Workpiece processing apparatus
AssigneeDisco Corporation
InventorsShinya WATANABE, Ichiro YAMAHATA, Katsuhiko SUZUKI
Life of this patent
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Abstract
A workpiece processing apparatus which coats a front surface of a workpiece with a resin, the workpiece having devices formed in regions demarcated by a plurality of planned dividing lines formed in a lattice manner. The workpiece processing apparatus includes a cassette mounting base mounted with a cassette housing a plurality of workpieces, a resin coating unit that coats the front surface of the workpiece with the resin, a resin curing unit that cures the resin by applying an external stimulus to the coated resin, a resin grinding unit that flattens the cured resin by grinding the cured resin by a rotating grinding stone, and a conveying mechanism that conveys the workpiece between the units.
Claims3
A workpiece processing apparatus which coats a front surface of a workpiece with a resin, the workpiece having a device formed in each of regions demarcated by a plurality of planned dividing lines formed in a lattice manner, the workpiece processing apparatus comprising:
- cassette mounting means mounted with a cassette housing a plurality of workpieces;
- resin coating means coating the front surface of the workpiece with the resin;
- resin curing means curing the resin by applying an external stimulus to the coated resin;
- resin grinding means flattening the cured resin by grinding the cured resin by a rotating grinding stone;
- and
- conveying means conveying the workpiece between the cassette mounting means, the resin coating means, the resin curing means, and the resin grinding means.
Dependencies are inferred from the claim text.