Passivation of Nonlinear Optical Crystals
AssigneeKLA-Tencor Corporation
InventorsYung-Ho Alex Chuang, Vladimir Dribinski
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Abstract
A laser system includes a nonlinear optical (NLO) crystal, wherein the NLO crystal is annealed within a selected temperature range. The NLO crystal is passivated with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound to a selected passivation level. The system further includes at least one light source, wherein at least one light source is configured to generate light of a selected wavelength and at least one light source is configured to transmit light through the NLO crystal. The system further includes a crystal housing unit configured to house the NLO crystal.
Claims20
A method comprising:
- providing a nonlinear optical (NLO) crystal;
- maintaining a temperature of the NLO crystal within a selected temperature range below a melting temperature of the NLO crystal;
- and
- exposing the NLO crystal to passivating gas having a concentration of at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound at or near a selected concentration to achieve a selected passivation level within the NLO crystal.
A method comprising:
- providing an NLO crystal;
- performing an annealing process on the NLO crystal;
- and
- exposing the NLO crystal to passivating gas having a concentration of at least one of hydrogen, deuterium, a hydrogen-containing compound and a deuterium-containing compound at or near a selected concentration to achieve a selected passivation level within the NLO crystal.
Dependencies are inferred from the claim text.