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US 2019/0198284 A1Published application
Electron source and electron beam irradiation device
AssigneeHitachi High-Technologies Corporation
InventorsSoichiro MATSUNAGA, Yasunari SOHDA, Souichi KATAGIRI, Hajime KAWANO, Takashi DOI
Life of this patent
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Abstract
Provided is a high-brightness, high-current electron source including a wire-like member. The wire-like member has an electron emission plane at the tip of the wire-like member. The electron emission plane has a projectingly curved surface. At least the surface of the electron emission plane is formed of an amorphous material.
Claims20
An electron beam irradiation device comprising:
- an electron source including a wire-like base material and a surface material, the wire-like base material being formed of a conductive material, the surface material being formed of an amorphous material at a tip of the base material and used as an electron emission plane having a projectingly curved surface;
- and
- an electron optical system that irradiates a sample with primary electrons extracted from the electron source.
An electron beam irradiation device comprising:
- an electron source including a wire-like member that is formed of a conductive amorphous material, a tip of the wire-like member acting as an electron emission plane having a projectingly curved surface;
- and
- an electron optical system that irradiates a sample with primary electrons extracted from the electron source.
An electron source including:
- a wire-like member that has an electron emission plane having a projectingly curved surface at a tip of the wire-like member, and
- at least a surface of the electron emission plane being formed of an amorphous material.
Dependencies are inferred from the claim text.