Calibration system with at least one camera and method thereof
AssigneeAdvanced Ion Beam Technology, Inc.
InventorsChien-Li Chen, Yu-Ho Ni, Chien-Cheng Kuo, Te-min Wang
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Abstract
A method for calibrating element in a semiconductor processing device with a camera is provided. The method for calibrating element in a semiconductor processing device with a camera includes taking a first picture of a first element by a camera; providing a first actuator to move the first element an increment along a first direction; taking a second picture of the first element by the camera; and comparing the first picture and the second picture to calibrate the first element. A system for calibrating element in a semiconductor processing device with a camera is also provided.
Claims19
A method for calibrating a first element in a semiconductor processing device with a camera, comprising:
- taking a first picture of said first element;
- providing a first actuator to move said first element along a first path;
- taking a second picture of said first element by said camera;
- and
- comparing said first picture and said second picture to calibrate said first element by moving said first element along said first path.
A system for calibrating element in a semiconductor processing device with a camera, comprising:
- a camera used for taking pictures of a first element;
- a first actuator used for moving said first element an increment along a first direction;
- and
- a computing unit used for recording said pictures and analyzing angles and distances of features of said first element in said pictures to produce a calibration message.
Dependencies are inferred from the claim text.