Methods and apparatus for a capacitive pressure sensor
AssigneeSemiconductor Components Industries, LLC
InventorsTakayasu OTAGAKI, Kensuke GOTO
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Abstract
Various embodiments of the present technology may provide methods and apparatus for a capacitive pressure sensor configured to detect firm pressure to a sensing surface. The capacitive pressure sensor may include a first substrate and a second substrate, wherein at least one of the first and second substrate is configured to deform when firm pressure is applied. The deformation of the sensor may either create a gap between the substrates or eliminate a gap between the substrates. The deformation may be interpreted as firm pressure to the sensing surface.
Claims20
A capacitive sensor, comprising:
- a first substrate, having a first surface;
- and
- a second substrate, having a first surface directly adjacent to the first surface of the first substrate, comprising:
- a capacitor comprising:
- a first electrode;
- and
- a second electrode positioned substantially coplanar with the first electrode;
- wherein the first electrode and the second electrode form a capacitance;
- wherein at least one of the first substrate and the second substrate is capable of deforming in response to an applied first pressure to produce a first change in the capacitance.
A method for detecting an applied pressure, comprising:
- providing a capacitive sensor comprising:
- a first substrate;
- and
- a second substrate abutting the first substrate;
- wherein:
- the second substrate comprises a first electrode coplanar with a second electrode;
- the first and second electrodes form a capacitance;
- and
- at least one of the first substrate and second substrate is capable of deforming in response to the applied pressure;
- generating an electric field between the first and second electrodes;
- measuring a change in the capacitance of the capacitive sensor;
- and
- utilizing the measured change in the capacitance to determine:
- an applied first pressure;
- and
- an applied second pressure.
A capacitive sensor, comprising:
- a first substrate, having a first surface;
- and
- a second substrate, having a first surface adjacent to the first surface of the first substrate, comprising:
- a capacitor comprising:
- a first electrode;
- and
- a second electrode positioned substantially coplanar with the first electrode;
- wherein the first electrode and the second electrode form a capacitance;
- wherein:
- a first gap is disposed between the first and second substrates;
- the second substrate deforms under a first applied pressure to a second surface of the second substrate and reduces at least a portion of the first gap between the first and second substrates;
- and
- the first substrate maintains its shape under the applied pressure.
Dependencies are inferred from the claim text.