Valve device
AssigneeShimadzu Corporation
InventorJunichiro KOZAKI
Life of this patent
Estimating the term…
Abstract
A valve device comprises an opening degree detection section and a control section. The control section performs, according to the pressure value and the opening degree detected by the opening degree detection unit, either one of open control for performing rough adjustment of the opening degree of the valve body or close control for performing fine adjustment of the opening degree of the valve body, in the open control, a predictive pressure estimation value at a preset future prediction target time from a current point is estimated, and the rough adjustment is performed based on the predictive pressure estimation value and the target pressure value, and in the close control, the fine adjustment is performed based on the target pressure value and the pressure value.
Claims13
A valve device provided between a vacuum chamber and a vacuum pump and configured to change an opening degree of a valve body to change a conductance, comprising:
- an opening degree detection section configured to detect the opening degree of the valve body;
- and
- a control section configured to control, based on a pressure value of the vacuum chamber and the opening degree detected by the opening degree detection section, the opening degree of the valve body such that the pressure value approaches a target pressure value, the pressure value and the target pressure value being input to the control section,
- wherein the control section performs, according to the pressure value and the opening degree detected by the opening degree detection unit, either one of open control for performing rough adjustment of the opening degree of the valve body or close control for performing fine adjustment of the opening degree of the valve body,
- in the open control, a predictive pressure estimation value at a preset future prediction target time from a current point is estimated, and the rough adjustment is performed based on the predictive pressure estimation value and the target pressure value, and
- in the close control, the fine adjustment is performed based on the target pressure value and the pressure value.
Dependencies are inferred from the claim text.