Internet-based semiconductor manufacturing equipment health and diagnostics monitoring

An apparatus for internet-based health and diagnostic monitoring of semiconductor manufacturing components, comprising:

• a memory to store at least program instructions and data;
• a processor, when executing the program instructions, to configure the apparatus to:
• receive health and diagnostic information and data from at least one component of a semiconductor manufacturing system;
• evaluate the received health and diagnostic information and data to determine if at least one of the at least one component of the semiconductor manufacturing system for which the health and diagnostic information and data was received is faulty;
• and
• if determined that at least one of the at least one component of the semiconductor manufacturing system is faulty, initiate a corrective action for the faulty component over the internet.

A semiconductor manufacturing system for internet-based health and diagnostic monitoring of semiconductor manufacturing components, comprising:

• a process chamber to process substrates, the process chamber comprising at least one component;
• an apparatus comprising a memory to store at least program instructions and data and a processor, when executing the program instructions, to configure the apparatus to:
• receive health and diagnostic information and data from the at least one component of the process chamber;
• evaluate the received health and diagnostic information and data to determine if at least one of the at least one component of process chamber for which the health and diagnostic information and data was received is faulty;
• and
• if determined that at least one of the at least one component of the process chamber is faulty, initiate a corrective action for the faulty component over the internet.