Data communication method for reducing working time of automated material handling system
AssigneeTokyo Electron Limited
InventorHak Seo OH
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AssigneeTokyo Electron Limited
InventorHak Seo OH
Estimating the term…
A data communication method for reducing a working time of an automated material handling system between a master communication device installed in an unmanned transfer device and a slave communication device installed in a manufacturing facility in the automated material handling system which transfers a carrier between manufacturing facilities through the unmanned transfer device where the method is to reduce a working time for a carrier by transmitting and receiving data to and from a manufacturing facility while an unmanned transfer device is stopped before performing a carrier work or while it is moving after performing a carrier work, when the unmanned transfer device and the manufacturing facility transmit and receive data for transferring the carrier by using a wireless data communicating device in an automated material handling system.
A data communication method for reducing a working time of an automated material handling system between a master communication device installed in an unmanned transfer device and a slave communication device installed in a manufacturing facility in the automated material handling system which transfers a carrier between manufacturing facilities through the unmanned transfer device, the method comprising:
Dependencies are inferred from the claim text.