Method and system for sensing fine changes in processing/equipment measurement data

Abstract

A method and a system for sensing fine changes in processing/equipment measurement data are provided. A data change sensing method according to an embodiment of the present invention extracts a part on the basis of a statistical distribution of reference data and comparison data, calculates a target range on the basis of a specification, and discriminates data, included in the target range, among the extracted reference data and comparison data so as to determine data changes. Therefore, fine changes in measurement data for processing or equipment can be sensed in a manufacturing process, thereby enabling pre-estimation of potential quality variability of products and quick preemptive actions for preventing quality degradation.

Dependencies are inferred from the claim text.