Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus
AssigneesASML Holding N.V., ASML Netherlands B.V.
InventorsKevin J VIOLETTE, Igor Matheus Petronella AARTS, Haico Victor KOK, Eric Brian CATEY
Life of this patent
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Abstract
A method, including printing an apparatus mark onto a structure while the structure is at least partly within a lithographic apparatus. The structure may be part of, or is located on, a substrate table, but is separate from a substrate to be held by the apparatus. The method further includes measuring the apparatus mark using a sensor system within the apparatus.
Claims21
A method, comprising:
- printing an apparatus mark onto a structure while at least partly within a substrate processing apparatus, the structure being separate from a substrate to be held by the apparatus, the printing involving using a patterned beam of radiation or using ablating radiation;
- and
- measuring the apparatus mark using a sensor system within the apparatus.
An substrate processing apparatus, comprising:
- a structure;
- a sensor system configured to measure a mark;
- and
- a control system configured to at least:
- cause printing of an apparatus mark onto the structure while at least partly within the apparatus, the structure being separate from a substrate to be held by the apparatus, the printing involving using a patterned beam of radiation or using ablating radiation, and
- cause measurement of the apparatus mark using the sensor system within the apparatus.
A non-transitory computer program product comprising machine-readable instructions therein, the machine-readable instructions, when executed, configured to cause a processor system to cause performance of at least:
- printing of an apparatus mark onto a structure while at least partly within a substrate processing apparatus, the structure being separate from a substrate to be held by the apparatus, the printing involving using a patterned beam of radiation or using ablating radiation;
- and
- measuring of the apparatus mark using a sensor system within the apparatus.
(canceled)
Dependencies are inferred from the claim text.