Resist composition and method of forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsYoichi HORI, Yasuhiro YOSHII, Masahito YAHAGI, Hitoshi YAMANO, Takahiro KOJIMA
Life of this patent
Estimating the term…
Abstract
A resist composition including a resin component whose solubility in a developing solution is changed due to an action of an acid, in which the resin composition has a constitutional unit derived from a compound containing a chain-like aliphatic acid dissociable group or a monocyclic aliphatic acid dissociable group and a constitutional unit derived from a compound containing an aromatic hydrocarbon group-containing acid dissociable group.
Claims4
A resist composition which generates an acid upon exposure and whose solubility in a developing solution is changed due to an action of the acid, the resist composition comprising:
- a resin component (A1) whose solubility in a developing solution is changed due to the action of the acid,
- wherein the resin component (A1) has a constitutional unit (a0-1) derived from a compound represented by Formula (a0-1) and a constitutional unit (a0-2) derived from a compound represented by Formula (a0-2):
- wherein W represents a polymerizable group-containing group, and Ra01 represents an acid dissociable group represented by Formula (a01-r-1) or (a01-r-2):
- wherein Ra011 to Ra013 each independently represents a linear or branched aliphatic hydrocarbon group, Ra014 represents a linear or branched aliphatic hydrocarbon group, Ra015 represents a group that forms a monocyclic aliphatic cyclic group together with a carbon atom to which Ra014 is bonded, and the symbol “*” represents a bonding site;
- wherein W represents a polymerizable group-containing group, and Ra02 represents an acid dissociable group represented by Formula (a02-r-1):
- wherein Ra021 and Ra022 each independently represents a linear or branched aliphatic hydrocarbon group, Ra023 represents an aromatic hydrocarbon group which may have a substituent, and the symbol “*” represents a bonding site.
Dependencies are inferred from the claim text.