Resist composition and method of forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakashi NAGAMINE, Emi UCHIDA, Tsuyoshi NAKAMURA
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakashi NAGAMINE, Emi UCHIDA, Tsuyoshi NAKAMURA
Estimating the term…
A resist composition containing a polymer compound which has a constitutional unit (a0) represented by Formula (a0-1); and an acid generator which is formed of a compound represented by Formula (b1) (in the formulae, Re represents an acid dissociable group represented by Formula (a0-r1-1); Ra01, Ra02, Ra031, Ra032, and Ra033 represent a hydrocarbon group; Ya° represents a quaternary carbon atom; Rb1 represents a hydrocarbon group which has a steroid skeleton containing at least one hydroxyl group; Y represents a divalent linking group having a single bond or a hetero atom; Vb1 represents a single bond, an alkylene group, or a fluorinated alkylene group; and Rf1 represents a hydrogen atom, a fluorine atom, or a fluorinated alkyl group).
A resist composition which generates an acid upon exposure and whose solubility in a developing solution is changed due to an action of the acid, the resist composition comprising:
The resist composition according to claiml, wherein Ra00 in Formula (a0-1) represents an acid dissociable group represented by Formula (a0-r1-1-1) or (a0-r1-1-2):
Dependencies are inferred from the claim text.