Electro-optical device and electronic apparatus
AssigneeSeiko Epson Corporation
InventorHidenori KAWATA
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Abstract
A liquid crystal device as an electro-optical device includes a base substrate as a substrate, a TFT as a transistor, and a holding capacitor, and the holding capacitor includes a first capacitance electrode disposed on the base substrate side and a second capacitance electrode disposed on the first capacitance electrode via a capacitance insulation film, and the first capacitance electrode includes a first electrode layer containing tungsten silicide, a second electrode layer containing silicide of a metal more stabilized through silicidation than tungsten, and a third electrode layer containing silicon stacked one on another.
Claims7
An electro-optical device comprising:
- a substrate,
- a transistor, and
- a holding capacitor, wherein
- the holding capacitor is provided between the substrate and the transistor, and includes a first capacitance electrode disposed on the substrate side, and a second capacitance electrode disposed on the first capacitance electrode via a capacitance insulation film, and
- the first capacitance electrode includes a first electrode layer containing tungsten silicide, a second electrode layer containing silicide of a metal more stabilized through silicidation than tungsten, and a third electrode layer containing silicon stacked one on another.
Dependencies are inferred from the claim text.