Actuator, optical scanning device, and manufacturing methods
AssigneeMitsumi Electric Co., Ltd.
InventorKensuke YAMADA
Life of this patent
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Abstract
An actuator includes a first driving beam that is connected to an object to be driven and includes multiple first beams extending in a direction orthogonal to a first predetermined axis, ends of each adjacent pair of the first beams being connected to each other via one of first turnaround parts such that the first driving beam forms a zig-zag bellows structure as a whole; first driving sources formed on first surfaces of the first beams; and ribs formed on second surfaces of the first beams at positions that are closer to the first predetermined axis than the first turnaround parts. The first driving sources are configured to move the first driving beam and thereby rotate the object around the first predetermined axis.
Claims13
An actuator, comprising:
- a first driving beam that is connected to an object to be driven and includes multiple first beams extending in a direction orthogonal to a first predetermined axis, ends of each adjacent pair of the first beams being connected to each other via one of first turnaround parts such that the first driving beam forms a zig-zag bellows structure as a whole;
- first driving sources formed on first surfaces of the first beams;
- and
- ribs formed on second surfaces of the first beams at positions that are closer to the first predetermined axis than the first turnaround parts,
- wherein the first driving sources are configured to move the first driving beam and thereby rotate the object around the first predetermined axis.
A method of manufacturing an actuator, the method comprising:
- patterning a silicon-on-insulator substrate to form an integrated substrate including multiple actuators, each of the actuators including
- a driving beam that is connected to an object to be driven and includes multiple beams extending in a direction orthogonal to a predetermined axis, ends of each adjacent pair of the beams being connected to each other via one of turnaround parts such that the driving beam forms a zig-zag bellows structure as a whole,
- driving sources formed on first surfaces of the beams, and
- ribs formed on second surfaces of the beams at positions that are closer to the predetermined axis than the turnaround parts, the driving sources being configured to move the driving beam and thereby rotate the object around the predetermined axis;
- attaching a dicing tape to a side of the integrated substrate on which the ribs are formed;
- dicing the integrated substrate to separate the actuators;
- and
- removing the separated actuators from the dicing tape.
An optical scanning device, comprising:
- a mirror including a light reflection surface;
- a mirror support structure that supports the mirror;
- a driving beam that is connected to the mirror support structure and includes multiple beams extending in a direction orthogonal to a predetermined axis, ends of each adjacent pair of the beams being connected to each other via one of turnaround parts such that the driving beam forms a zig-zag bellows structure as a whole;
- driving sources formed on first surfaces of the beams;
- and
- ribs formed on second surfaces of the beams at positions that are closer to the predetermined axis than the turnaround parts,
- wherein the driving sources are configured to move the driving beam and thereby rotate the mirror support structure around the predetermined axis.
A method of manufacturing an optical scanning device, the method comprising:
- patterning a silicon-on-insulator substrate to form an integrated substrate including multiple actuators, each of the actuators including
- a mirror including a light reflection surface,
- a mirror support structure that supports the mirror,
- a driving beam that is connected to the mirror support structure and includes multiple beams extending in a direction orthogonal to a predetermined axis, ends of each adjacent pair of the beams being connected to each other via one of turnaround parts such that the driving beam forms a zig-zag bellows structure as a whole,
- driving sources formed on first surfaces of the beams, and
- ribs formed on second surfaces of the beams at positions that are closer to the predetermined axis than the turnaround parts, the driving sources being configured to move the driving beam and thereby rotate the mirror support structure around the predetermined axis;
- attaching a dicing tape to a side of the integrated substrate on which the ribs are formed;
- dicing the integrated substrate to separate the actuators;
- and
- removing the separated actuators from the dicing tape.
Dependencies are inferred from the claim text.