Wire grid polarization element and electronic device
AssigneeSeiko Epson Corporation
InventorYoshitomo KUMAI
Life of this patent
Estimating the term…
Loading patent…
AssigneeSeiko Epson Corporation
InventorYoshitomo KUMAI
Estimating the term…
A wire grid polarization element includes a wire grid including a plurality of wire-shaped metal layers arranged in parallel on one surface of a substrate, and a light-absorbing layer including a germanium film containing at least one of oxygen and nitrogen is provided on a side opposite to the substrate with respect to the plurality of wire-shaped metal layers. Such a germanium film can be formed by mixing an oxygen gas or a nitrogen gas into an argon gas in film formation by reactive sputtering. In this case, a flow rate of the oxygen gas or the nitrogen gas is made appropriate and thus, a complex refraction index of the germanium film is set to an appropriate value, and a reflectance with respect to linearly polarized light vibrating in an extending direction of the wire-shaped metal layers is set to 3.0% or lower.
A wire grid polarization element comprising:
An electronic device comprising:
Dependencies are inferred from the claim text.