Optical filter and sensor system
AssigneeViavi Solutions Inc.
InventorsKaren Denise HENDRIX, Richard A. BRADLEY, JR., Marius GRIGONIS, Georg J. OCKENFUSS
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Abstract
An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
Claims21
1-20. (canceled)
An optical device, comprising:
- a substrate having a first side and a second side;
- a first set of layers on the first side, wherein the first set of layers includes silicon and hydrogen;
- a second set of layers on the first side, wherein the second set of layers includes oxygen;
- and
- a third set of layers on the second side, whether the third set of layers includes oxygen.
An optical device, comprising:
- a first set of layers including silicon and hydrogen;
- and
- a second set of layers including oxygen;
- wherein
- the optical device has a passband,
- the passband has a center wavelength, and
- the center wavelength shifts by less than 15 nm in magnitude with a change in incidence angle from 0° to 30°.
An optical device, comprising:
- a first set of layers including silicon and hydrogen;
- and
- a second set of layers including oxygen;
- wherein the optical device has a blocking level of greater than OD2 over a wavelength range of 400 nm to 1100 nm.
Dependencies are inferred from the claim text.