Multiple beam image acquisition apparatus and multiple beam image acquisition method

A multiple beam image acquisition apparatus comprising:

• a stage configured to mount thereon a target object;
• a beam forming mechanism configured to form multiple primary electron beams and a measurement primary electron beam;
• a primary electron optical system configured to collectively irradiate a surface of the target object with the multiple primary electron beams and the measurement primary electron beam;
• a secondary electron optical system configured to collectively guide multiple secondary electron beams generated because the target object is irradiated with the multiple primary electron beams, and a measurement secondary electron beam generated because the target object is irradiated with the measurement primary electron beam;
• a multi-detector configured to detect the multiple secondary electron beams collectively guided;
• a measurement mechanism configured to measure a position of the measurement secondary electron beam collectively guided;
• and
• a correction mechanism configured to correct a trajectory of the multiple secondary electron beams by using a measured position of the measurement secondary electron beam.