Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structure

A measurement processing method, comprising:

• setting an evaluation region on a partial region of a specimen;
• calculating a plurality of different non-defective factors regarding the specimen from shape information acquired based upon a transmission image of x-ray that has transmitted the specimen;
• and
• determining non-defectiveness of the evaluation region based upon the calculated plurality of different non-defectiveness factors.

A measurement processing device, comprising:

• a setting unit that sets an evaluation region on a partial region of a specimen;
• a calculation unit that calculates a plurality of different non-defective factors regarding the specimen from shape information acquired based upon a transmission image of x-ray that has transmitted the specimen;
• and
• a determination unit that determines non-defectiveness of the evaluation region based upon the calculated plurality of different non-defectiveness factors.

An x-ray inspection apparatus, comprising:

• a setting unit that sets an evaluation region on a partial region of a specimen;
• a calculation unit that calculates a plurality of different non-defective factors regarding the specimen from shape information acquired based upon a transmission image of x-ray that has transmitted the specimen;
• and
• a determination unit that determines non-defectiveness of the evaluation region based upon the calculated plurality of different non-defectiveness factors.