US 2019/0195765 A1 · PARTICLE COUNTING METHOD AND DEVICE

Abstract

A particle counting method comprises obtaining first particle information related to the gas to be measured by a first particle counter with a first particle size detection range, obtaining second particle information related to the gas to be measured by a second particle counter with a second particle size detection range, and generating particle size distribution information according to the first and second particle information. The first particle information includes a plurality of particle size ranges and a plurality of particle quantities wherein each of the plurality of particle size ranges corresponds to a respective one of the plurality of particle quantities, the second particle information includes the quantity of particles of which the size values are in the second particle size range, and the lower limit of the second particle size range is lower than that of the first particle size range.

Claims18

Dependent claims

A particle counting method, comprising:

obtaining first particle information related to a gas to be analyzed by a first particle counter having a first particle size detection range, with the first particle information comprising a plurality of particle size ranges in the first particle size detection range and a plurality of particle quantities, with each of the plurality of particle size ranges corresponding to a respective one of the plurality of particle quantities;
obtaining second particle information related to the gas to be analyzed by a second particle counter having a second particle size detection range, with the second particle information comprising a quantity sum of particles with size values being in the second particle size detection range;
and
generating particle size distribution information of the gas to be analyzed according to the first particle information and the second particle information;
wherein a lower limit of the second particle size detection range is lower than a lower limit of the first particle size detection range.

2 more elements

A particle counting device, comprising:

a first particle counter, having a first particle size detection range, and configured to obtain first particle information related to a gas to be analyzed, with the first particle information comprising a plurality of particle size ranges in the first particle size detection range and a plurality of particle quantities, with each of the plurality of particle size ranges corresponding to a respective one of the plurality of particle quantities;
a second particle counter, having a second particle size detection range, and configured to obtain second particle information related to the gas to be analyzed, with the second particle information comprising a quantity sum of particles with size values being in the second particle size detection range;
and
a controller, electrically connected with the first particle counter and the second particle counter, and configured to generate particle size distribution information of the gas to be analyzed according to the first particle information and the second particle information;
wherein a lower limit of the second particle size detection range is lower than a lower limit of the first particle size detection range.

2 more elements

Dependencies are inferred from the claim text.

Particle counting method and device

Life of this patent

Particle counting method and device

Life of this patent

Abstract

Claims18