Pyroelectric sensor with improved electromagnetic shielding

9:

• The heat pattern sensor according to claim 1, wherein:
• each pixel further comprises a heating element, able to heat by Joule effect the pyroelectric material portion of said pixel;
• and
• a heating stage, comprising the heating elements of each of the pixels, extends into the matrix of pixels between the stage including a pyroelectric material and the protective layer.

10:

• The heat pattern sensor according to claim 9, wherein:
• the heating elements of a same line of pixels are formed together in one piece, in a same heating strip;
• the charge collection electrodes of a same column of pixels are formed together in one piece, in a same charge collection macro-electrode;
• and
• each pad of the electromagnetic shielding stage extends through an intersection region between a projection of a heating strip and a projection of a charge collection macro-electrode, said projections being orthogonal projections in a plane parallel to an upper or lower face of the substrate.

11:

• The heat pattern sensor according to claim 9, wherein the matrix of pixels comprises, superimposed:
• the stage of charge collection electrodes;
• the stage including a pyroelectric material;
• the electromagnetic shielding stage, further forming the reference electrodes of the pixels of the matrix of pixels;
• an electrical insulation layer;
• the heating stage;
• and
• the protective layer.

12:

• The heat pattern sensor according to claim 9, wherein the matrix of pixels comprises, superimposed:
• the stage of charge collection electrodes;
• the stage including a pyroelectric material;
• the heating stage the heating elements further forming the reference electrodes of the pixels of the matrix of pixels;
• an electrical insulation layer;
• the electromagnetic shielding stage;
• and
• the protective layer.

13:

• A method for manufacturing the matrix of pixels of a heat pattern sensor according to claim 1, wherein a step of producing the electromagnetic shielding stage includes the following steps:
• depositing the insulating layer, such that it extends without opening above the substrate;
• depositing, on said insulating layer, an ink including particles in suspension in a solvent, the solvent being able to dissolve locally the insulating layer;
• and
• evacuating the solvent, to form the pads of the electromagnetic shielding stage, distributed in the insulating layer.