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US 2019/0195659 A1Published application
Sensor device
AssigneeCarl Zeiss SMT GmbH
InventorsRalf Ameling, Markus Hauf
Life of this patent
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Abstract
A sensor device for capturing the displacement position of an optical component includes a plurality of stator electrodes and a mechanism or restricting the electric field that is relevant to the measurement of the displacement position to the region of the stator electrodes
Claims20
A sensor device configured to capture a displacement position of an optical component, the sensor device comprising:
- a plurality of stator electrodes, each stator electrode comprising a plurality of individual electrodes arranged in a ring-shaped region and extending in a plane through a central axis of the ring-shaped region;
- a movable electrode configured to variably shield of an electric field in a region of the stator electrodes depending on a displacement position of the optical component;
- and
- a mechanism configured to restrict the electric field relevant to a measurement of the displacement position of the optical component to the region of the stator electrodes.
1 more element
Dependencies are inferred from the claim text.