Vibrator device, method of manufacturing vibrator device, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsMasashi SHIMURA, Atsushi MATSUO, Shinya AOKI, Shiro MURAKAMI, Ryuta NISHIZAWA
Life of this patent
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Abstract
A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view.
Claims16
A vibrator device comprising:
- a base;
- a first relay substrate mounted on the base;
- a second relay substrate mounted on the first relay substrate;
- and
- a vibrator element mounted on the second relay substrate, wherein,
- the second relay substrate is disposed between the first relay substrate and the vibrator, and
- the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view.
A method of manufacturing a vibrator device comprising:
- preparing a laminated structure that includes a first relay substrate, a second relay substrate mounted on the first relay substrate, and a vibrator element which is disposed so as to sandwich the second relay substrate with the first relay substrate, and is mounted on the second relay substrate;
- and
- measuring a frequency of the vibrator element,
- wherein the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view, and
- in the measuring of the frequency of the vibrator element, frequency measurement of the vibrator element is performed through the terminal.
Dependencies are inferred from the claim text.