Position determining system
AssigneeIndiana University Research and Technology Corporation
InventorsHrishikesh Balasaheb Zambare, Ali Razban, Suhas Pandurang Deshmukh, Mahesh Shivaji Shewale, Sharad S. Mulik
Life of this patent
Estimating the term…
Abstract
An XYZ flexural mechanism comprising an X-axis flexural mechanism comprising a first voice coil actuator, a motion stage platform, a plurality of flexural bearings, and a plurality of guide rods, a Y-axis flexural mechanism comprising a second voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, and a Z-axis flexural mechanism comprising a third voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, the frame supporting the XYZ flexural mechanism.
Claims20
An XYZ flexural mechanism comprising:
- an X-axis flexural mechanism comprising a first voice coil actuator, a motion stage platform, a plurality of flexural bearings, and a plurality of guide rods;
- a Y-axis flexural mechanism comprising a second voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame;
- and
- a Z-axis flexural mechanism comprising a third voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, the frame supporting the XYZ flexural mechanism.
A position determining system comprising:
- an XYZ flexural mechanism comprising:
- an X-axis flexural mechanism comprising a first voice coil actuator and a motion stage platform,
- a Y-axis flexural mechanism comprising a second voice coil actuator,
- a Z-axis flexural mechanism comprising a third voice coil actuator, and
- a frame, the frame supporting the XYZ flexural mechanism;
- and
- a mechatronic interface system comprising:
- a computer configured to provide amplitude and frequency values to a connection board coupled to the computer and to determine an estimated position of the motion stage platform based on corresponding current and voltage values of each of the first, second, and third voice coil actuators;
- and
- the connection board configured to provide a control signal based on the amplitude and frequency values provided by the computer, the control signal configured to control the XYZ flexural mechanism.
An XYZ flexural mechanism comprising:
- an X-axis flexural mechanism comprising a first voice coil actuator, a first flexural bearing, and a motion stage platform;
- a Y-axis flexural mechanism comprising a second voice coil actuator and a second flexural bearing;
- a Z-axis flexural mechanism comprising a third voice coil actuator and a third flexural bearing;
- a frame, the frame supporting the XYZ flexural mechanism;
- each of the first, second, and third voice coil actuators comprising a linear motor, a piston, a magnet, and a voice coil, and connected to a supporting structure such that the first, second, and third flexural bearings support the motion stage platform in an orthogonal direction and allow smooth frictionless motion in axial directions relative to the motion stage platform.
Dependencies are inferred from the claim text.