Fluid control system

A joining block defining a top surface and a bottom surface facing each other, and side surfaces extending from the top surface toward the bottom surface side, and defining a fluid flow path, the joining block comprising:

• an engaging part engageable with another member on the bottom surface side;
• and
• two screw holes, each connectable with another member and formed from the top surface toward the bottom surface side, wherein:
• the fluid flow path of the joining block comprises two first flow paths, each extending from the top surface toward the bottom surface side and provided with a flow path port that opens at the top surface, and a second flow path extending linearly through an interior of the joining block in the longitudinal direction and connected with the two first flow paths, in positions separated from each other in a longitudinal direction;
• and
• the two screw holes are disposed between the two flow path ports in the longitudinal direction, the screw holes each comprising a tip portion closed above the second flow path and each at least partially overlapping the second flow path in a planar view.

A fluid device comprising at least one of a switch valve, a regulator, a pressure gauge, and a mass flow controller, the fluid device comprising:

• a body defining a fluid flow path and provided with at least two flow path ports that open on a bottom surface side thereof;
• and
• a joining block defining a top surface and a bottom surface facing each other, and side surfaces extending from the top surface toward the bottom surface side, and defining a fluid flow path, wherein:
• the fluid flow path of the joining block comprises a first flow path extending from the top surface toward the bottom surface side and provided with a flow path port that opens at the top surface, and a second flow path extending through an interior of the joining block in the longitudinal direction and connected with the first flow path, in positions separated from each other in a longitudinal direction;
• the joining block comprises an engaging part engageable with another member on the bottom surface side, and a screw hole that opens on the top surface side, extends toward the bottom surface side, and is for screwing a tightening bolt that has passed through the body;
• the tightening bolt produces a tightening force that compresses a sealing member between the body and the joining block, the sealing member being disposed around the flow path port of the joining block and one of the flow path ports of the body that face each other;
• and
• the screw hole comprises a tip portion closed above the second flow path, and at least partially overlaps the second flow path in a planar view.

A fluid control system comprising:

• a first joining block and a second joining block, each defining a top surface and a bottom surface facing each other, and side surfaces extending from the top surface toward the bottom surface side, defining a fluid flow path, and comprising an engaging part on the bottom surface side;
• a support member comprising a guide part that extends linearly in a longitudinal direction and is engageable with each of the engaging parts of the first and the second joining blocks;
• and
• a fluid device supported by the support member via the first and the second joining blocks, wherein:
• the fluid flow path of the joining block comprises a first flow path extending from the top surface toward the bottom surface side and provided with a flow path port that opens at the top surface, and a second flow path extending through an interior of the joining block in the longitudinal direction and connected with the first flow path;
• the guide part constrains the joining block on the support member while allowing the joining block to move in the longitudinal direction;
• the fluid device comprises a body defining a fluid flow path and provided with at least two flow path ports that open on a bottom surface side thereof;
• the first joining block comprises a screw hole that opens at the top surface, extends toward the bottom surface side, and is for screwing a tightening bolt that has passed through the body of the fluid device;
• the second joining block comprises a screw hole that opens at the top surface, extends toward the bottom surface side, and is for screwing a tightening bolt that has passed through the body of the fluid device;
• two said tightening bolts that have passed through the body of the fluid device produce tightening forces that press respective sealing members between the body and the first and the second joining blocks, the sealing members being disposed around the flow path port of the first joining block and one of the flow path ports of the body, that face each other, and around the flow path port of the second joining block and the other flow path port of the body, that face each other;
• and
• the screw holes of the first and the second joining blocks each comprise a tip portion closed above the second flow path of the first or second joining block and at least partially overlap the second flow path of the first or second joining block in a planar view.