METHOD OF MANUFACTURING SiC INGOT
AssigneeShowa Denko K.K.
InventorYohei FUJIKAWA
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AssigneeShowa Denko K.K.
InventorYohei FUJIKAWA
Estimating the term…
A method of measuring a SiC ingot includes a measuring step of measuring a curving direction of an atomic arrangement plane of a SiC single crystal at least along a first direction passing through a center in plan view and a second direction intersecting with the first direction to obtain a shape of the atomic arrangement plane; and a crystal growth step of performing crystal growth using the SiC single crystal as a seed crystal, in which in a case where the shape of the atomic arrangement plane measured in the measuring step is a saddle type, a crystal growth condition in the crystal growth step is set such that a convexity of a second growth front at the end of crystal growth becomes larger than a convexity of a first growth front when an amount of crystal growth in the center of the seed crystal is 7 mm.
A method of manufacturing a SiC ingot, comprising:
Dependencies are inferred from the claim text.