Heat treatment apparatus for high-quality graphene synthesis

Abstract

The present invention relates to a heat treatment apparatus for high-quality graphene synthesis, and more particularly, to a heat treatment apparatus for high-quality graphene synthesis capable of more effectively depositing graphene on a catalytic metal film. The present invention provides a heat treatment apparatus for high-quality graphene synthesis comprising: an upper roll chamber, a deposition chamber 20 connected to the upper roll chamber to deposit graphene on a catalytic metal film, and a lower roll chamber mounted on a lower portion of the deposition chamber, in which the upper roll chamber includes a supply roller supplying the catalytic metal film and a winding roller winding the catalytic metal film deposited with the graphene, the lower roll chamber includes a lower direction shifting roller shifting a direction of the catalytic metal film which is supplied from the supply roller, deposited with the graphene in the deposition chamber, and wound on the winding roller, and in the deposition chamber, a catalytic metal film at a supply side transferred from the supply roller to the lower direction shifting roller and a catalytic metal film at a discharge side transferred from the lower direction shifting roller to the winding roller are passed, and a heater portion is mounted around the catalytic metal film at the supply side and the catalytic metal film at the discharge side.

Dependencies are inferred from the claim text.