Multi-electrode molecular sensing devices and methods of making the same
AssigneeRoswell Biotechnologies, Inc.
InventorsSungho Jin, Barry L. Merriman, TIm Geiser, Chulmin Choi, Paul Mola
Life of this patent
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Abstract
A molecular sensor includes a substrate defining a substrate plane, and a plurality of pairs of electrode sheets above or below the substrate at an angle to the substrate plane. The molecular sensor further includes a plurality of inner dielectric sheets between each electrode sheet in each pair of electrode sheets of the plurality of pairs, and an outer dielectric sheet between each pair of electrode sheets of the plurality of pairs.
Claims20
A method of manufacturing a structure usable in a molecular sensor device, the method comprising the steps of:
- providing a substrate that defines a substrate plane and further comprises a protrusion protruding from the substrate at an angle to the substrate plane;
- placing a sacrificial layer on a surface of the protrusion that is opposite from the substrate;
- depositing a first electrode layer in an orientation along a side of the protrusion to form a first electrode sheet at the angle to the substrate plane;
- depositing an inner dielectric layer on the first electrode layer to form an inner dielectric sheet at the angle to the substrate plane;
- depositing a second electrode layer on the inner dielectric layer to form a second electrode sheet at the angle to the substrate plane, wherein the first electrode sheet and the second electrode sheet form a pair of electrode sheets with the inner dielectric sheet between the first electrode sheet and the second electrode sheet;
- depositing an outer dielectric layer on the second electrode layer to form an outer dielectric sheet at an angle to the substrate plane;
- removing the sacrificial layer;
- attaching a mechanically supportive block material adjacent to the outer dielectric layer;
- planarizing the first and second electrode sheets, inner dielectric sheet, and the outer dielectric sheet;
- and
- removing an exposed end portion of the inner dielectric sheet to form a groove located on an exposed end portion of the inner dielectric sheet.
A method of manufacturing a structure usable in a molecular sensor device, the method comprising the steps of:
- providing a substrate that defines a substrate plane and further comprises a protrusion protruding from the substrate at an angle to the substrate plane;
- placing one or both of:
- (a) a first detachable shade in an orientation along a side of the substrate, and (b) a second detachable shade on a surface of the protrusion that is opposite from the substrate;
- depositing a first electrode layer in an orientation along a side of the protrusion to form a first electrode sheet at the angle to the substrate plane;
- depositing an inner dielectric layer on the first electrode layer to form an inner dielectric sheet at the angle to the substrate plane;
- depositing a second electrode layer on the inner dielectric layer to form a second electrode sheet at the angle to the substrate plane, wherein the first electrode sheet and the second electrode sheet form a pair of electrode sheets with the inner dielectric sheet between the first electrode sheet and the second electrode sheet;
- depositing an outer dielectric layer on the second electrode layer to form an outer dielectric sheet at an angle to the substrate plane;
- removing one or both of:
- (a) the first detachable shade, and (b) the second detachable shade;
- attaching a mechanically supportive block material adjacent to the outer dielectric layer;
- planarizing the first and second electrode sheets, inner dielectric sheet, and the outer dielectric sheet;
- and
- removing an exposed end portion of the inner dielectric sheet to form a groove located on an exposed end portion of the inner dielectric sheet.
Dependencies are inferred from the claim text.