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US 2019/0194580 A1Published application
Treatment liquid and method for treating laminate
AssigneeFUJIFILM Corporation
InventorTetsuya KAMIMURA
Life of this patent
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Abstract
A treatment liquid is a treatment liquid for a semiconductor device, which contains a fluorine-containing compound and a water-soluble aromatic compound not having a heterocyclic group but having a benzene ring, and has a pH of 5 or less.
Claims27
A treatment liquid for a semiconductor device, comprising:
- a fluorine-containing compound;
- and
- a water-soluble aromatic compound not having a heterocyclic group but having a benzene ring,
- wherein the treatment liquid has a pH of 5 or less.
1 more element
Dependencies are inferred from the claim text.