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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsShinji KUMADA, Kenji SEKI, Takumi NAMIKI
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A surface treatment liquid capable of hydrophobizing a surface of a treatment target without including a silylation agent, a surface treatment method using the liquid, and a method for suppressing pattern collapse, including surface treatment by the surface treatment method. The liquid contains a nitrogen-containing heterocyclic compound as a water-repelling agent. A compound including one or more hydrocarbon groups which may be substituted with a halogen atom in which a total number of carbon atoms of the one or more hydrocarbon group is three or more, is used as the nitrogen-containing heterocyclic compound. The liquid may include only a nitrogen-containing heterocyclic compound having the above-described predetermined structure, as a water-repelling agent.
A surface treatment liquid comprising a water-repelling agent (A), wherein the water-repelling agent (A) includes a nitrogen-containing heterocyclic compound having a nitrogen-containing heterocyclic ring only including a carbon atom, a hydrogen atom, and a nitrogen atom, as a main skeleton, and does not include a silylation agent, wherein the nitrogen-containing heterocyclic ring is substituted with one or more hydrocarbon groups which may be substituted with a halogen atom, the hydrocarbon group may be substituted with a halogen atom, and a total number of carbon atoms of the one or more hydrocarbon groups is three or more.
Dependencies are inferred from the claim text.