Laser-releasable bonding materials for 3-d ic applications
AssigneeBrewer Science Inc.
InventorsXiao Liu, Qi Wu, Rama Puligadda, Dongshun Bai, Baron Huang
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Abstract
Novel thermoplastic polyhydroxyether-based compositions for use as a laser-releasable composition for temporary bonding and laser debonding processes are provided. The inventive compositions can be debonded using various UV lasers, leaving behind little to no debris. The layers formed from these compositions possess good thermal stabilities and are soluble in commonly-used organic solvents (e.g., cyclopentanone). The compositions can also be used as build-up layers for RDL formation.
Claims49
A temporary bonding method comprising:
- providing a stack comprising:
- a first substrate having a back surface and a front surface;
- a bonding layer adjacent said front surface and comprising a polyhydroxyether;
- and
- a second substrate having a first surface adjacent said bonding layer;
- and
- exposing said bonding layer to laser energy so as to facilitate separation of said first and second substrates.
A microelectronic structure comprising:
- a first substrate having a back surface and a front surface;
- a bonding layer adjacent said front surface, said bonding layer comprising a polyhydroxyether;
- and
- a second substrate having a first surface adjacent said bonding layer, at least one of said front surface and said first surface being a device surface.
A method of forming a microelectronic structure, said method comprising:
- (I) forming a build-up layer on the surface of a substrate, said build-up layer comprising a polyhydroxyether and having an upper surface that is remote from the surface of said substrate;
- (II) forming a first redistribution layer on said upper surface;
- and
- (III) optionally forming one or more additional redistribution layers on said first redistribution layer.
A microelectronic structure comprising:
- a substrate having a surface;
- a build-up layer on the substrate surface, said build-up layer comprising a polyhydroxyether and having an upper surface that is remote from said substrate surface;
- and
- a first redistribution layer on said upper surface.
Dependencies are inferred from the claim text.