Ceramic device and manufacturing method thereof
AssigneeIndustrial Technology Research Institute
InventorsMeng-Chi Huang, Tune-Hune Kao, Guan-Ting Lin
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Abstract
A ceramic device including a ceramic material, a patterned metal structure, and a surface activation material is provided. A surface of the ceramic material at least includes a first surface and a second surface that are not coplanar. The ceramic material has recesses on the surface thereof. The patterned metal structure is disposed on the first surface and the second surface. The surface activation material is disposed on a surface of the recesses and located at an interface between the ceramic material and the patterned metal structure.
Claims31
A ceramic device, comprising:
- a ceramic material, wherein a surface of the ceramic material at least comprises a first surface and a second surface that are not coplanar, and the ceramic material has recesses on the surface thereof;
- a patterned metal structure disposed on the first surface and the second surface;
- and
- a surface activation material disposed on a surface of the recesses and located at an interface between the ceramic material and the patterned metal structure.
A manufacturing method of a ceramic device, comprising:
- providing a ceramic material;
- forming recesses on a surface of the ceramic material;
- performing a surface activation treatment on the surface of the ceramic material after the recesses are formed;
- forming a first metal layer on the surface of the ceramic material after the surface activation treatment via an electroless plating process;
- and
- performing a patterning process on the first metal layer to form a first patterned metal layer.
Dependencies are inferred from the claim text.