# US 2019/0174120 A1 · Time-resolving sensor using shared ppd+spad pixel and spatial-temporal correlation for range measurement

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- Number: US 2019/0174120 A1
- Document ID: US20190174120A1
- Status: Published application
- Kind: A1
- Application number: 16/254,582
- Filed: 2019-01-22
- Published: 2019-06-06
- Earliest claimed: 2017-05-16
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Yibing Michelle WANG
- Web page: https://patentgrep.com/patent/US20190174120A1

## CPC

- H04N 13/254: in combination with electromagnetic radiation sources for illuminating objects
- G01S 7/4863: Detector arrays, e.g. charge-transfer gates
- G01S 7/4865: Time delay measurement, e.g. time-of-flight measurement, time of arrival measurement or determining the exact position of a peak (peak detection in noise, signal conditioning G01S7/487)
- G01S 17/10: using transmission of interrupted, pulse-modulated waves (determination of distance by phase measurements G01S17/32)
- G01S 17/894: Three-dimensional [3D] imaging with simultaneous measurement of time-of-flight at a two-dimensional [2D] array of receiver pixels, e.g. time-of-flight cameras or flash lidar
- H04N 25/535: by dynamic region selection
- H04N 25/705: Pixels for depth measurement, e.g. RGBZ
- H04N 25/77: Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
- H04N 25/771: comprising storage means other than floating diffusion
- H04N 25/773: comprising photon counting circuits, e.g. single photon detection [SPD] or single photon avalanche diodes [SPAD]
- H04N 25/78: Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES

## Abstract

An image sensor includes a plurality of a first type of diodes and a time-resolving sensor. The time-resolving sensor outputs first and second reset signals, and first and second measurement signals. The two reset signals respective represent a reset-charge level of a first and a second floating diffusion. The measurement signals are output in response the diodes detecting at least one incident photon. First and second time-of-flight (TOF) signals are formed by respective subtracting the first and second reset signals from the first and second measurement signals. A first ratio of a magnitude of the first signal to a sum of the magnitudes of the first and second signals is proportional to a TOF of the detected photon, and a second ratio of the magnitude of the second signal to the sum of the magnitudes of the first and second signals is proportional to the TOF of the detected photons.

## Claims

### Claim 1

An image sensor, comprising:
a plurality of a first type of diodes that each detect one or more incident photons; and
a time-resolving sensor that outputs a first reset signal, a second reset signal, a first measurement signal and a second measurement signal, the first reset signal representing a reset-charge level of a first floating diffusion and the second reset signal representing a reset-charge level of a second floating diffusion, the first reset signal and the second reset signal being output in response to a reset condition, the first measurement signal and second measurement signal being output in response to detecting by the at least two of the first type of diodes one or more incident photons that have been reflected from an object corresponding to a light pulse projected toward the object, a first signal being formed by subtracting the first reset signal from the first measurement signal and a second signal being formed by subtracting the second reset signal from the second measurement signal, a first ratio of a magnitude of the first signal to a sum of the magnitude of the first signal and a magnitude of the second signal being proportional to a time of flight of the one or more detected incident photons, and a second ratio of the magnitude of the second signal to the sum of the magnitude of the first signal and the magnitude of the second signal being proportional to the time of flight of the one or more detected incident photons.

### Claim 2 (depends on 1)

The image sensor of claim 1, further comprising a processor that determines a distance to the object based on the first signal and second signal.

### Claim 3 (depends on 1)

The image sensor of claim 1, wherein the time-resolving sensor receives a ramp-shaped modulating signal that controls transfer of a first portion of a charge on a capacitive device to the first floating diffusion and transfer of a second portion of the charge on the capacitive device to the second floating diffusion, the second portion of the charge being substantially equal to a remainder of the charge on the capacitive device after the first portion has been transferred.

### Claim 4 (depends on 3)

The image sensor of claim 3, wherein a diode of the first type of diodes comprises a single photon avalanche diode (SPAD) and the capacitive device comprises a pinned photo diode (PPD) or a capacitor.

### Claim 5 (depends on 3)

The image sensor of claim 3, wherein at least one first type of diode is biased to be used in an avalanche photo diode mode.

### Claim 6 (depends on 1)

The image sensor of claim 1, further comprising:
a plurality of pixels, at least one pixel of the plurality of pixels comprising the plurality of the first type of diodes; and
a logic circuit coupled to an output signal of the plurality of the first type of diodes, the logic circuit generating a first enable signal and a second enable signal, the first enable signal being active in response to a beginning of an active shutter signal and being inactive in response to the output signal of the plurality of the first type of diodes, and the second enable signal being in active in response to the output signal of the plurality of the first type of diodes and being inactive in response to an end of the active shutter signal,
wherein the time-resolving sensor is coupled to the first and second enable signals, the time-resolving sensor further comprising:
a capacitive device having a first terminal and a second terminal, the second terminal being coupled to a ground voltage;
a first switching device having first, second and third terminals, the first terminal of the first switching device being coupled to the first terminal of the capacitive device, the second terminal of the first switching device being coupled to the first floating diffusion, and the third terminal of the first switching device being coupled to the first enable signal, the first switching device being responsive to the first enable signal to transfer a first measurement charge on the capacitive device to the first floating diffusion;
a second switching device having first, second and third terminals, the first terminal of the second switching device being coupled to the first terminal of the capacitive device, the second terminal of the second switching device being coupled to a second floating diffusion, and the third terminal of the second switching device being coupled to the second enable signal, the second switching device being responsive to the second enable signal to transfer a second measurement charge on the capacitive device to the second floating diffusion, the second measurement charge representing a remaining charge on the capacitive device after the first measurement charge has been transferred to the first floating diffusion; and
an output circuit to output the first measurement signal and the second measurement signal, the first measurement signal comprising a first voltage that is based on the first measurement charge on the first floating diffusion and the second measurement signal comprising a second voltage that is based on the remaining charge on the second floating diffusion.

### Claim 7 (depends on 6)

The image sensor of claim 6, further comprising a drive signal that changes based on a ramp function, the drive signal beginning to change in response to a beginning time of the light pulse from which the one or more incident photons are detected to the end of the active shutter signal, the drive signal being connected to the third terminal of the first switching device if the first enable signal is active and being connected to the third terminal of the second switching device if the second enable signal is active.

### Claim 8 (depends on 7)

The image sensor of claim 7, wherein the first ratio of the first voltage to the sum of the first voltage and the second voltage is further proportional to the time of flight of the one or more incident photons minus a delay time and the second ratio of the second voltage to the sum of the first voltage and the second voltage is further proportional to the time of flight of the one or more incident photons minus a delay time, the delay time comprising a time between a beginning of a transmission time of the light pulse to a time that the drive signal begins to change.

### Claim 9

A pixel in an image sensor, the pixel comprising:
a plurality of a first type of diodes that each detects one or more incident photons;
a time-resolving sensor that outputs a first reset signal, a second reset signal, a first measurement signal and a second measurement signal; and
a control circuit coupled to the plurality of the first type of diodes and the time-resolving sensor, the control circuit controlling the time-resolving sensor to output the first reset signal and the second reset signal in response to a reset condition, and controlling the time-resolving sensor to output the first measurement signal and the second measurement signal in response to detecting by the at least two of the first type of diodes one or more incident photons that have been reflected from an object corresponding to a light pulse projected toward the object, a first ratio of a magnitude of a first signal to a sum of the magnitude of the first signal and a magnitude of a second signal being proportional to a time of flight of the one or more detected incident photons, and a second ratio of the magnitude of the second signal to the sum of the magnitude of the first signal and the magnitude of the second signal being proportional to the time of flight of the one or more detected incident photons, the first signal being formed by subtracting the first reset signal from the first measurement signal and the second signal being formed by subtracting the second reset signal from the second measurement signal.

### Claim 10 (depends on 9)

The pixel of claim 9, wherein the time-resolving sensor comprises:
a capacitive device operable to store a charge;
a first floating diffusion; and
a second floating diffusion,
wherein the first reset signal comprises a reset-charge level on the first floating diffusion and the second reset signal comprises a reset-charge level on the second floating diffusion during the reset condition.

### Claim 11 (depends on 10)

The pixel of claim 10, wherein the time-resolving sensor receives a ramp-shaped modulating signal that controls transfer of a first portion of the charge on the capacitive device to the first floating diffusion and controls transfer of a second portion of the charge on the capacitive device to the second floating diffusion, the second portion of the charge being substantially equal to a remainder of the charge on the capacitive device after the first portion has been transferred to the first floating diffusion.

### Claim 12 (depends on 11)

The pixel of claim 11, wherein the ramp-shaped modulating signal begins to change in response to a beginning time of the light pulse from which the one or more incident photons are detected to an end of an active shutter signal.

### Claim 13 (depends on 11)

The pixel claim 11, wherein a diode of the first type of diodes comprises a single photon avalanche diode (SPAD) and the capacitive device comprises a pinned photo diode (PPD) or a capacitor.

### Claim 14 (depends on 11)

The pixel of claim 11, wherein at least one first type of diode is biased to be used in an avalanche photo diode mode.

### Claim 15 (depends on 9)

The pixel of claim 9, wherein a distance to the object is based on the first signal and second signal.

### Claim 16 (depends on 9)

The pixel of claim 9, wherein the pixel comprises one of a plurality of pixels in the image sensor.

### Claim 17

An imaging unit, comprising:
a light source that projects a light pulse; and
an image sensor unit comprising an array of pixels, at least one pixel comprising:
at least two diodes of a first type that each detects one or more incident photons; and
a time-resolving sensor that outputs a first reset signal, a second reset signal, a first measurement signal and a second measurement signal; and
a control circuit coupled to the at least two diodes of the first type and the time-resolving sensor of the at least one pixel, the control circuit controlling the time-resolving sensor to output the first reset signal and the second reset signal in response to a reset condition, and controlling the time-resolving sensor to output the first measurement signal and the second measurement signal in response to detecting by the at least two of the first type of diodes one or more incident photons that have been reflected from an object corresponding to a light pulse projected toward the object, a first ratio of a magnitude of a first signal to a sum of the magnitude of the first signal and a magnitude of a second signal being proportional to a time of flight of the one or more detected incident photons, and a second ratio of the magnitude of the second signal to the sum of the magnitude of the first signal and the magnitude of the second signal being proportional to the time of flight of the one or more detected incident photons, the first signal being formed by subtracting the first reset signal from the first measurement signal and the second signal being formed by subtracting the second reset signal from the second measurement signal.

### Claim 18 (depends on 17)

The imaging unit of claim 17, wherein the time-resolving sensor comprises:
a capacitive device operable to store a charge;
a first floating diffusion; and
a second floating diffusion,
wherein the first reset signal comprises a reset-charge level on the first floating diffusion and the second reset signal comprises a reset-charge level on the second floating diffusion during the reset condition.

### Claim 19 (depends on 18)

The imaging unit of claim 18, wherein the time-resolving sensor receives a ramp-shaped modulating signal that controls transfer of a first portion of the charge on the capacitive device to the first floating diffusion and controls transfer of a second portion of the charge on the capacitive device to the second floating diffusion, the second portion of the charge being substantially equal to a remainder of the charge on the capacitive device after the first portion has been transferred to the first floating diffusion.

### Claim 20 (depends on 19)

The imaging unit of claim 19, wherein a diode of the first type comprises a single photon avalanche diode (SPAD) and the capacitive device comprises a pinned photo diode (PPD) or a capacitor.
