# US 2019/0173046 A1 · Organic light-emitting apparatus and method of manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0173046 A1 - Document ID: US20190173046A1 - Status: Published application - Kind: A1 - Application number: 16/185,876 - Filed: 2018-11-09 - Published: 2019-06-06 - Earliest claimed: 2017-12-01 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Sehoon Jeong; Jaesik Kim; Jaeik Kim; Yeonhwa Lee; Joongu Lee; Jiyoung Choung - Web page: https://patentgrep.com/patent/US20190173046A1 ## CPC - H10K 59/122: Pixel-defining structures or layers, e.g. banks - H10K 50/15: Hole transporting layers - H10K 50/16: Electron transporting layers - H10K 59/131: Interconnections, e.g. wiring lines or terminals - H10K 59/32: Stacked devices having two or more layers, each emitting at different wavelengths - H10K 59/80522: {combined with auxiliary electrodes} - H10K 71/166: {using selective deposition, e.g. using a mask} - H10K 71/221: {by lift-off techniques} - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract A method includes: forming first and second pixel electrodes on a substrate; exposing upper surfaces of the first and second pixel electrodes; forming a pixel defining layer covering edges of the first and second pixel electrodes; sequentially forming a first lift-off layer, a first shape memory alloy layer, and a first photoresist; forming a first opening exposing an upper surface of the first pixel electrode by patterning the first lift-off layer, the first shape memory alloy layer, and the first photoresist; forming, on the first pixel electrode and the first photoresist, a first organic functional layer including a first emission layer; deforming an end portion of the first shape memory alloy layer, in the first opening, in a direction away from a horizontal surface of the substrate; forming a first protection layer over the first organic functional layer; and removing a remainder of the first lift-off layer. ## Claims ### Claim 1 A method of manufacturing an organic light-emitting apparatus, the method comprising: forming first and second pixel electrodes on a substrate; exposing upper surfaces of the first and second pixel electrodes; forming a pixel defining layer covering edges of the first and second pixel electrodes; sequentially forming a first lift-off layer, a first shape memory alloy layer, and a first photoresist on the first and second pixel electrodes and the pixel defining layer; forming a first opening exposing an upper surface of the first pixel electrode by patterning the first lift-off layer, the first shape memory alloy layer, and the first photoresist; forming, on the first pixel electrode and the first photoresist, a first organic functional layer including a first emission layer; deforming an end portion of the first shape memory alloy layer, in the first opening, in a direction away from a horizontal surface of the substrate; forming a first protection layer over the first organic functional layer; and removing a remainder of the first lift-off layer. ### Claim 2 (depends on 1) The method of claim 1, wherein the first lift-off layer comprises a fluoropolymer. ### Claim 3 (depends on 1) The method of claim 1, wherein the first organic functional layer further comprises at least one functional layer selected from the group consisting of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. ### Claim 4 (depends on 1) The method of claim 1, wherein, in the forming of the first opening, the first photoresist is patterned in a photolithography process. ### Claim 5 (depends on 1) The method of claim 1, wherein, in the forming of the first opening, the first shape memory alloy layer is etched by chemical etching. ### Claim 6 (depends on 1) The method of claim 1, wherein, in the forming of the first opening, the first lift-off layer is etched by using a first solvent comprising fluorine. ### Claim 7 (depends on 1) The method of claim 1, wherein the first organic functional layer and the first protection layer are formed in a deposition process. ### Claim 8 (depends on 1) The method of claim 1, wherein the first shape memory alloy layer comprises a material which deforms at a deformation temperature in a range of 50° C. to 100° C. ### Claim 9 (depends on 1) The method of claim 1, wherein the first protection layer is deposited over an area larger than the first organic functional layer such that the first protection layer covers the first organic functional layer. ### Claim 10 (depends on 1) The method of claim 1, wherein, when the first lift-off layer is removed, the first lift-off layer is removed by using a second solvent comprising fluorine. ### Claim 11 (depends on 1) The method of claim 1, wherein, after the first lift-off layer is removed, a common electrode is formed directly on the first protection layer. ### Claim 12 (depends on 1) The method of claim 1, wherein the first protection layer is formed of a conductive material. ### Claim 13 (depends on 1) The method of claim 1, wherein, after the first opening is formed, an organic functional layer and a first cathode are formed on the first pixel electrode and the first photoresist, the organic functional layer including a first emission layer, and the first protection layer is formed after the first shape memory alloy layer is deformed. ### Claim 14 (depends on 1) The method of claim 1, wherein, in the forming of the pixel defining layer, an auxiliary electrode is formed on the pixel defining layer such that the auxiliary electrode and the pixel defining layer are connected to each other, and in the forming of the first protection layer, the first protection layer is formed such that the first protection layer overlaps an end portion of the auxiliary electrode. ### Claim 15 (depends on 14) The method of claim 14, wherein the first protection layer is formed of a conductive material. ### Claim 16 (depends on 15) The method of claim 15, wherein a second protection layer including an insulating material is further formed on the first protection layer. ### Claim 17 A method of manufacturing an organic light-emitting apparatus, the method comprising: forming, on a substrate, a first pixel electrode and a second pixel electrode; exposing upper surfaces of the first and second pixel electrodes; forming a pixel defining layer covering edges of the first and second pixel electrodes; performing a first unit process, the first unit process comprising: sequentially forming, on the first and second pixel electrodes and the pixel defining layer, a first lift-off layer, a first shape memory alloy layer, and a first photoresist; forming a first opening exposing an upper surface of the first pixel electrode by patterning the first lift-off layer, the first shape memory alloy layer, and the first photoresist; forming, on the first pixel electrode and the first photoresist, a first organic functional layer including a first emission layer; deforming an end portion of the first shape memory alloy layer, in the first opening, in a direction away from a horizontal surface of the substrate, and forming a first protection layer on the first organic functional layer; and removing a remainder of the first lift-off layer, and after performing the first unit process, performing a second unit process, the second unit process comprising: sequentially forming a second lift-off layer, a second shape memory alloy layer, and a second photoresist, on the first organic functional layer, the second pixel electrode, and the pixel defining layer; forming a second opening such that an upper surface of the second pixel electrode is exposed, by patterning the second lift-off layer, the second shape memory alloy layer, and the second photoresist; forming, on the second pixel electrode and the second photoresist, a second organic functional layer including a second emission layer; deforming an end portion of the second shape memory alloy layer, in the second opening, in a direction away from a horizontal surface of the substrate, and forming a second protection layer on the second organic functional layer; and removing a remainder of the second lift-off layer. ### Claim 18 (depends on 17) The method of claim 17, wherein a color of light emitted from the first emission layer is different from a color of light emitted from the second emission layer. ### Claim 19 (depends on 17) An organic light-emitting apparatus manufactured by the method of claim 17. ### Claim 20 An organic light-emitting apparatus comprising: a first pixel electrode and a second pixel electrode spaced apart from each other on a substrate; a pixel defining layer covering edges of the first and second pixel electrodes; an auxiliary electrode arranged on the pixel defining layer such that the auxiliary electrode and the pixel defining layer are electrically connected to each other; a first organic functional layer and a second organic functional layer, respectively arranged on the first and second pixel electrodes and respectively including a first emission layer and a second emission layer; and a first protection layer and a second protection layer, arranged on the first and second organic functional layers, covering the first and second organic functional layers, and connected to the auxiliary electrode, respectively, wherein each of the first and second protection layers comprises a conductive material.