# US 2019/0173033 A1 · Method for making photodetector > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0173033 A1 - Document ID: US20190173033A1 - Status: Published application - Kind: A1 - Application number: 16/253,112 - Filed: 2019-01-21 - Published: 2019-06-06 - Earliest claimed: 2017-04-28 - Assignees: Tsinghua University; Hon Hai Precision Industry Co., Ltd. - Applicants: Tsinghua University; Hon Hai Precision Industry Co., Ltd. - Inventors: HAO-MING WEI; YANG WEI; KAI-LI JIANG; SHOU-SHAN FAN - Web page: https://patentgrep.com/patent/US20190173033A1 ## CPC - C23C 14/0605: {Carbon} - C23C 14/24: Vacuum evaporation - C23C 14/243: {Crucibles for source material (C23C14/28, C23C14/30 take precedence)} - H10K 30/81: Electrodes - H10K 30/82: Transparent electrodes, e.g. indium tin oxide [ITO] electrodes - H10K 30/821: {comprising carbon nanotubes} - H10K 30/83: comprising arrangements for extracting the current from the cell, e.g. metal finger grid systems to reduce the serial resistance of transparent electrodes - H10K 71/12: using liquid deposition, e.g. spin coating - H10K 71/164: {using vacuum deposition} - H10K 71/621: {Providing a shape to conductive layers, e.g. patterning or selective deposition} - H10K 85/30: Coordination compounds - H10K 85/331: {Metal complexes comprising an iron-series metal, e.g. Fe, Co, Ni} - H10K 85/371: {Metal complexes comprising a group IB metal element, e.g. comprising copper, gold or silver} - H10K 85/381: {Metal complexes comprising a group IIB metal element, e.g. comprising cadmium, mercury or zinc} - H10K 85/50: Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3 - H10K 30/50: Photovoltaic [PV] devices - H10K 85/221: {Carbon nanotubes} - Y02E 10/549: Organic PV cells - Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION - Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS ## Abstract A method of making a photodetector includes: providing a substrate and forming an interdigital electrode layer on a surface of the substrate; and forming a photoactive layer on a surface of the interdigital electrode layer. ## Claims ### Claim 1 A method of making a photodetector comprising: providing a substrate and forming an interdigital electrode layer on a surface of the substrate; and forming a photoactive layer on a surface of the interdigital electrode layer. ### Claim 2 (depends on 1) The method of claim 1, wherein the forming the interdigital electrode layer on the surface of the substrate comprises: cleaning the substrate; depositing an interdigital electrode film on the surface of the substrate; locating a mask on the interdigital electrode film; and photoetching the interdigital electrode film. ### Claim 3 (depends on 1) The method of claim 1, wherein the forming the photoactive layer on the surface of the interdigital electrode layer comprises: obtaining an evaporating source, wherein the evaporating source comprises a carbon nanotube film structure and a photoactive material, and the photoactive material is located on a surface of the carbon nanotube film structure; and spacing the evaporating source from the interdigital electrode layer; and heating the carbon nanotube film structure to gasify the photoactive material to depositing the photoactive material on the surface of the interdigital electrode layer. ### Claim 4 (depends on 3) The method of claim 3, wherein a distance between the interdigital electrode layer and the carbon nanotube film structure is in a range from about 1 micrometer to about 10 millimeters. ### Claim 5 (depends on 3) The method of claim 3, wherein the photoactive material is applied on the surface of the carbon nanotube film structure by a solution method, a vapor deposition method, a plating method or a chemical plating method. ### Claim 6 (depends on 5) The method of claim 5, wherein the photoactive material is applied on the surface of the carbon nanotube film structure by the solution method, the solution method comprises: dispersing the photoactive material in a solvent to form a mixture; applying the mixture on the carbon nanotube film structure to form a composite; and drying the composite. ### Claim 7 (depends on 6) The method of claim 6, wherein the photoactive material comprises a plurality of materials, and the plurality of materials are dissolved in the solvent and mixed with each other. ### Claim 8 (depends on 3) The method of claim 3, wherein the spacing the evaporating source from the interdigital electrode layer comprises placing the evaporating source and the interdigital electrode layer in a vacuum chamber. ### Claim 9 (depends on 3) The method of claim 3, wherein the heating the carbon nanotube film structure comprises inputting an electromagnetic signal to heat the carbon nanotube film structure by an electromagnetic signal input device. ### Claim 10 (depends on 3) The method of claim 3, wherein the heating the carbon nanotube film structure comprises inputting an electrical signal to heat the carbon nanotube film structure by a first electrical signal input electrode and a second electrical signal input electrode. ### Claim 11 (depends on 10) The method of claim 10, wherein the carbon nanotube film structure comprises a plurality of carbon nanotubes, and the plurality of carbon nanotubes extend from the first electrical signal input electrode to the second electrical signal input electrode. ### Claim 12 (depends on 3) The method of claim 3, wherein the photoactive material is a mixture of methylammonium iodide and lead iodide. ### Claim 13 (depends on 3) The method of claim 3, wherein a heat capacity per unit area of the carbon nanotube film structure is less than 2×10−4 J/cm2·K, and a specific surface area of the carbon nanotube film structure is larger than 200 m2/g. ### Claim 14 (depends on 3) The method of claim 3, wherein the carbon nanotube film structure comprises a carbon nanotube film, the carbon nanotube film comprises a plurality of nanotubes joined end to end by Van der Waals attractive force. ### Claim 15 (depends on 3) The method of claim 3, wherein the carbon nanotube film structure and the interdigital electrode layer are parallel to and spaced from each other. ### Claim 16 (depends on 3) The method of claim 3, wherein the carbon nanotube film structure is a free-standing structure.