# US 2019/0173029 A1 · Method of manufacturing flexible oled display panel > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0173029 A1 - Document ID: US20190173029A1 - Status: Published application - Kind: A1 - Application number: 15/916,470 - Filed: 2018-03-09 - Published: 2019-06-06 - Earliest claimed: 2017-12-05 - Assignees: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. - Applicants: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. - Inventors: Xiang JIN - Web page: https://patentgrep.com/patent/US20190173029A1 ## CPC - H10K 71/00: Manufacture or treatment specially adapted for the organic devices covered by this subclass - G06F 3/0412: {Digitisers structurally integrated in a display} - H10K 59/1201: {Manufacture or treatment} - H10K 59/1213: {the pixel elements being TFTs} - H10K 71/221: {by lift-off techniques} - H10K 71/80: using temporary substrates - H10K 77/111: {Flexible substrates} - H10K 2102/311: {Flexible OLED} - Y02E 10/549: Organic PV cells - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION ## Abstract A method of manufacturing flexible OLED display panel is provided. The method comprises following steps. Providing a glass carrier, sequentially forming a flexible substrate, a low temperature poly-Si layer and OLED element layer on a surface of the glass carrier; forming a planar layer on a surface of the glass carrier which is backward to the flexible substrate and obtaining a planning OLED display panel; removing the glass carrier by laser lift-off the planning OLED display panel and obtaining the flexible OLED display panel. The method could better improve the problem of laser is unevenly distributing in the flexible substrate during the laser lift-off process causes lower peeling successful rate. ## Claims ### Claim 1 A method of manufacturing flexible OLED display panel, comprising providing a glass carrier, sequentially forming a flexible substrate, a low temperature poly-Si layer and OLED element layer on a surface of the glass carrier, forming a planar layer on a surface of the glass carrier which is backward to the flexible substrate and obtaining a planning OLED display panel; removing the glass carrier by laser lift-off the planning OLED display panel, and obtaining a flexible OLED display panel. ### Claim 2 (depends on 1) The method of manufacturing flexible OLED display panel according to claim 1, wherein the planar layer has laser transmittance ≥90% in 300-400 nm wavelength range. ### Claim 3 (depends on 2) The method of manufacturing flexible OLED display panel according to claim 2, wherein material of the planar layer has laser absorption rate ≤6% in 300-400 nm wavelength range. ### Claim 4 (depends on 1) The method of manufacturing flexible OLED display panel according to claim 1, wherein roughness of the planar layer is Ra≤0.4 μm. ### Claim 5 (depends on 3) The method of manufacturing flexible OLED display panel according to claim 3, wherein roughness of the planar layer is 0.05-0.3 μm. ### Claim 6 (depends on 1) The method of manufacturing flexible OLED display panel according to claim 1, wherein thickness of the planar layer is 50-120 μm. ### Claim 7 (depends on 6) The method of manufacturing flexible OLED display panel according to claim 6, wherein thickness of the glass carrier is 400-500 μm. ### Claim 8 (depends on 7) The method of manufacturing flexible OLED display panel according to claim 7, wherein the planar layer and the glass carrier which are stacking positioned have laser transmittance ≥40% in 300-400 nm wavelength range. ### Claim 9 (depends on 1) The method of manufacturing flexible OLED display panel according to claim 1, wherein composite material of the planar layer comprises at least one of organic material or inorganic material, the organic material comprises at least one of epoxy, acrylic resin and silicone; the inorganic material comprises at least one of silicon dioxide, magnesium fluoride, calcium fluoride and barium fluoride. ### Claim 10 (depends on 3) The method of manufacturing flexible OLED display panel according to claim 3, wherein composite material of the planar layer comprises at least one of organic material or inorganic material, the organic material comprises at least one of epoxy, acrylic resin and silicone; the inorganic material comprises at least one of silicon dioxide, magnesium fluoride, calcium fluoride and barium fluoride. ### Claim 11 (depends on 5) The method of manufacturing flexible OLED display panel according to claim 5, wherein composite material of the planar layer comprises at least one of organic material or inorganic material, the organic material comprises at least one of epoxy, acrylic resin and silicone; the inorganic material comprises at least one of silicon dioxide, magnesium fluoride, calcium fluoride and barium fluoride. ### Claim 12 (depends on 8) The method of manufacturing flexible OLED display panel according to claim 8, wherein composite material of the planar layer comprises at least one of organic material or inorganic material, the organic material comprises at least one of epoxy, acrylic resin and silicone; the inorganic material comprises at least one of silicon dioxide, magnesium fluoride, calcium fluoride and barium fluoride. ### Claim 13 (depends on 12) The method of manufacturing flexible OLED display panel according to claim 12, wherein composite material of the planar layer is silicon dioxide. ### Claim 14 (depends on 9) The method of manufacturing flexible OLED display panel according to claim 9, wherein the step of forming the planar layer which is mixing the composite material of the planar layer and solvent to obtain a sizing mixture; coating the sizing mixture on the surface of the glass carrier which is backward to the flexible substrate; and curing to from the planar layer. ### Claim 15 (depends on 12) The method of manufacturing flexible OLED display panel according to claim 12, wherein the step of forming the planar layer which is mixing the composite material of the planar layer and solvent to obtain a sizing mixture; coating the sizing mixture on the surface of the glass carrier which is backward to the flexible substrate; and curing to from the planar layer. ### Claim 16 (depends on 1) The method of manufacturing flexible OLED display panel according to claim 1, wherein during the laser lift-off, the laser wavelength is 300-400 nm; the laser energy is 290-350 mJ. ### Claim 17 (depends on 1) The method of manufacturing flexible OLED display panel according to claim 1, wherein sequentially forming a packaging protecting layer, a flexible rear cover on the OLED element layer, the flexible substrate and the flexible rear cover are forming an enclosed space for accommodating the OLED element layer and the packaging protecting layer. ### Claim 18 (depends on 17) The method of manufacturing flexible OLED display panel according to claim 17, wherein the packaging protecting layer encapsulating the OLED element and the low temperature poly-Si layer on the flexible substrate; the packaging protecting layer is formed by organic film and inorganic film are alternatively positioned. ### Claim 19 (depends on 17) The method of manufacturing flexible OLED display panel according to claim 17, wherein forming a touch wire on the flexible substrate; or forming a first blocking layer on the flexible substrate, and forming the touch wire on the first blocking layer. ### Claim 20 (depends on 19) The method of manufacturing flexible OLED display panel according to claim 19, wherein a second blocking layer is positioned between the touch wire and the low temperature poly-Si layer.