# US 2019/0172889 A1 · Wiring structure and display device having the wiring structure

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- Number: US 2019/0172889 A1
- Document ID: US20190172889A1
- Status: Published application
- Kind: A1
- Application number: 16/183,039
- Filed: 2018-11-07
- Published: 2019-06-06
- Earliest claimed: 2017-12-04
- Assignees: Japan Display Inc.
- Applicants: Japan Display Inc.
- Inventors: Kenta KAJIYAMA
- Web page: https://patentgrep.com/patent/US20190172889A1

## CPC

- H10D 86/441: {Interconnections, e.g. scanning lines}
- H10D 86/60: wherein the TFTs are in active matrices
- H10K 59/131: Interconnections, e.g. wiring lines or terminals
- G09G 3/3233: with pixel circuitry controlling the current through the light-emitting element
- H10K 59/805: {Electrodes}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- G09G: ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION (arrangements for transferring data between digital computers and displays G06F3/14; static indicating arrangements comprising an association of a number of separate sources or light control cells G09F9/00; static indicating arrangements comprising integral associations of a number of light sources H01J, H01K, H10H, H05B33/12; scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission, details thereof H04N1/00)

## Abstract

Provided is a wiring structure having: a first wiring; a first insulating film over the first wiring; a second wiring over the first insulating film, the second wiring intersecting the first wiring; an electrode over the first insulating film, the electrode being spaced from the second wiring; and a second insulating film over the second wiring and the electrode. The entire electrode overlaps with the first wiring. A top surface of the first insulating film is entirely in contact with the second insulating film over the first wiring and between the second wiring and the electrode.

## Claims

### Claim 1

A wiring structure comprising:
a first wiring;
a first insulating film over the first wiring;
a second wiring over the first insulating film and intersecting the first wiring;
an electrode over the first insulating film and spaced from the second wiring; and
a second insulating film over the second wiring and the electrode,
wherein an entire region of the electrode overlaps with the first wiring in a plan view, and
a top surface of the first insulating film is entirely in contact with the second insulating film in a region immediately over the first wiring and between the second wiring and the electrode.

### Claim 2 (depends on 1)

The wiring structure according to claim 1,
wherein the first wiring comprises:
a first conductive film;
a second conductive film over the first conductive film; and
a third conductive film over the second conductive film,
the first conductive film and the third conductive film each include titanium, molybdenum, tungsten, or tantalum, and
the second conductive film includes aluminum or copper.

### Claim 3 (depends on 2)

The wiring structure according to claim 2,
wherein a side surface of the second conductive film overlaps with at least one of a top surface of the first conductive film and a bottom surface of the third conductive film.

### Claim 4 (depends on 1)

The wiring structure according to claim 1,
wherein the first insulating film has a step caused by the first wiring, and
an angle between a top surface of the first insulating film, which does not overlap with the first wiring, and a side surface of the first insulating film in the step is equal to or more than 0° and equal to or less than 90°.

### Claim 5 (depends on 1)

The wiring structure according to claim 1,
wherein the first insulating film has an opening overlapping with the first wiring, and
the electrode is electrically connected to the first wiring through the opening.

### Claim 6 (depends on 1)

The wiring structure according to claim 1, further comprising:
a third wiring under the first wiring; and
a third insulating film between the first wiring and the third wiring,
wherein the first wiring, the first insulating film, and the third insulating film each have an opening, and
the electrode is electrically connected to the first wiring and the third wiring through the openings of the first wiring, the first insulating film, and the third insulating film.

### Claim 7 (depends on 6)

The wiring structure according to claim 6,
wherein the first insulating film and the third insulating film are in contact with each other in the opening of the first wiring.

### Claim 8 (depends on 6)

The wiring structure according to claim 6,
wherein the third wiring includes silicon.

### Claim 9

A display device comprising:
a transistor including a semiconductor film, a gate insulating film over the semiconductor film, a gate over the gate insulating film, a first interlayer insulating film over the gate, a second interlayer insulating film over the first interlayer insulating film, a first terminal over the second interlayer insulating film, and a second terminal over the second interlayer insulating film;
a leveling film over the transistor;
a display element over the leveling film and electrically connected to the second terminal; and
a first wiring sandwiched between the first interlayer insulating film and the second interlayer insulating film and electrically connected to the first terminal,
wherein the first wiring has a first opening, and the second interlayer insulating film is in contact with the leveling film and the first interlayer insulating film through the first opening.

### Claim 10 (depends on 9)

The display device according to claim 9,
wherein the gate insulating film, the first interlayer insulating film, and the second interlayer insulating film each have a second opening overlapping with the first opening of the first wiring, and
wherein the first terminal is electrically connected to the semiconductor film through the second openings of the first wiring, the gate insulating film, the first interlayer insulating film, and the second interlayer insulating film.

### Claim 11 (depends on 9)

The display device according to claim 9,
wherein the first wiring comprises:
a first conductive film;
a second conductive film over the first conductive film; and
a third conductive film over the second conductive film,
the first conductive film and the third conductive film each include titanium, molybdenum, tungsten, or tantalum, and
the second conductive film includes aluminum or copper.

### Claim 12 (depends on 11)

The display device according to claim 11,
wherein a side surface of the second conductive film overlaps with at least one of a top surface of the first conductive film and a bottom surface of the third conductive film.

### Claim 13 (depends on 9)

The display device according to claim 9,
wherein the second interlayer insulating film has a step caused by the first wiring, and
an angle between a top surface of the second interlayer insulating film, which does not overlap with the first wiring, and a side surface of the second interlayer insulating film in the step is equal to or more than 0° and equal to or less than 90°.

### Claim 14 (depends on 9)

The display device according to claim 9
wherein the display element is an electroluminescence element, and
the first wiring is configured to supply current to the display element.

### Claim 15

A display device comprising:
a transistor including a semiconductor film, a gate insulating film over the semiconductor film, a gate over the gate insulating film, a first interlayer insulating film over the gate, a second interlayer insulating film over the first interlayer insulating film, a first terminal over the second interlayer insulating film, and a second terminal over the second interlayer insulating film;
a display element electrically connected to the second terminal; and
a first wiring sandwiched between the first interlayer insulating film and the second interlayer insulating film and electrically connected to the first terminal,
wherein the entire first terminal is surrounded by an outline of the first wiring.

### Claim 16 (depends on 15)

The display device according to claim 15,
wherein the first wiring, the gate insulating film, the first interlayer insulating film, and the second interlayer insulating film each have an opening, and
the first terminal is electrically connected to the semiconductor film through the openings.

### Claim 17 (depends on 15)

The display device according to claim 15,
wherein the first wiring comprises:
a first conductive film;
a second conductive film over the first conductive film; and
a third conductive film over the second conductive film,
the first conductive film and the third conductive film each include titanium, molybdenum, tungsten, or tantalum, and
the second conductive film include aluminum or copper.

### Claim 18 (depends on 17)

The display device according to claim 17,
wherein a side surface of the second conductive film overlaps with at least one of a top surface of the first conductive film and a bottom surface of the third conductive film.

### Claim 19 (depends on 15)

The display device according to claim 15,
wherein the second insulating film has a step caused by the first wiring, and
an angle between a top surface of the second interlayer insulating film, which does not overlap with the first wiring, and a side surface of the second interlayer insulating film in the step is equal to or more than 0° and equal to or less than 90°.

### Claim 20 (depends on 15)

The display device according to claim 15,
wherein the display element is an electroluminescence element, and
the first wiring is configured to supply current to the display element.
