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US 2019/0172674 A1Published application
Electron emitter and method of fabricating same
AssigneeASML Netherlands B.V.
InventorsJuying DOU, Zhang Fan, Tzu-Yi Kuo, Zhong-wei Chen
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Abstract
Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.
Claims15
An electron emitter comprising:
- a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers;
- and
- a work-function-lowering material coated on the tip.
A thermal field emission cathode, comprising:
- an emitter comprising:
- a tip configured to release field emission electrons, the tip having a planar region with a diameter in a range of approximately (0.05-10) micrometers;
- and
- a work-function-lowing material coated on the tip;
- and
- a heating component configured to provide thermal energy to the emitter.
3 more elements
A method comprising:
- applying a restraint to an electron emitter having a tip;
- under the restraint, forming a planar region on the tip;
- and
- removing the restraint.
1 more element
Dependencies are inferred from the claim text.