# US 2019/0171328 A1 · Aligning method for use in semiconductor inspection apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0171328 A1 - Document ID: US20190171328A1 - Status: Published application - Kind: A1 - Application number: 16/104,309 - Filed: 2018-08-17 - Published: 2019-06-06 - Earliest claimed: 2017-12-05 - Assignees: Mpi Corporation - Applicants: MPI Corporation - Inventors: Lin-Lin Chih; Guan-Jhih Liou; Chien-Hung Chen; Yung-Chin Liu - Web page: https://patentgrep.com/patent/US20190171328A1 ## CPC - G06F 3/0416: {Control or interface arrangements specially adapted for digitisers} - G06T 7/0004: {Industrial image inspection} - G06T 7/73: using feature-based methods - G06T 2207/30148: Semiconductor; IC; Wafer - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ## Abstract An aligning method for use in semiconductor inspection apparatus is provided. The semiconductor inspection apparatus includes a stage and a touch-control screen. The aligning method includes defining a reference direction; displaying an image of a device under test supported by the stage on the touch-control screen; detecting a first touch point and a second touch point occurred on the touch-control screen; defining a straight line according to the first touch point and the second touch point; calculating an included angle defined by the straight and the reference direction; and rotating the stage according to the included angle. ## Claims ### Claim 1 An aligning method for use in a semiconductor inspection apparatus, wherein the semiconductor inspection apparatus comprises a stage and a touch-control screen, wherein the aligning method comprises: defining a reference direction; displaying an image of a device under test (DUT) supported by the stage on the touch-control screen; detecting a first touch point and a second touch point occurred on the touch-control screen, and defining a straight line according to the first touch point and the second touch point; calculating an included angle defined by the straight line and the reference direction; and rotating the stage according to the included angle. ### Claim 2 (depends on 1) The aligning method according to claim 1, further comprising: displaying the straight line on the touch-control screen. ### Claim 3 (depends on 1) The aligning method according to claim 1, further comprising: displaying the first touch point and the second touch point on the touch-control screen. ### Claim 4 (depends on 1) The aligning method according to claim 1, wherein after detecting the first touch point and the second touch point occurred on the touch-control screen, further comprising: detecting a variation of the first touch point and the second touch point; and adjusting the straight line according to the variation of the first touch point and the second touch point. ### Claim 5 An aligning method for use in a semiconductor inspection apparatus, wherein the semiconductor inspection apparatus comprises a stage and a touch-control screen, wherein the aligning method comprise: displaying an image of a device under test (DUT) supported by the stage on the touch-control screen; detecting a first touch point and a second touch point occurred on the touch-control screen, and defining a first straight line according to the first touch point and the second touch point; detecting a third touch point and a fourth touch point occurred on the touch-control screen, and defining a second straight line according to the third touch point and the fourth touch point; calculating an included angle defined by the first straight line and the second straight line; and rotating the stage according to the included angle. ### Claim 6 (depends on 5) The aligning method according to claim 5, further comprising: displaying the first straight line on the touch-control screen. ### Claim 7 (depends on 6) The aligning method according to claim 6, further comprising: displaying the second straight line on the touch-control screen. ### Claim 8 (depends on 5) The aligning method according to claim 5, further comprising: displaying the second straight line on the touch-control screen. ### Claim 9 (depends on 5) The aligning method according to claim 5, further comprising: displaying the first touch point, the second touch point, the third touch point, and the fourth touch point on the touch-control screen. ### Claim 10 (depends on 6) The aligning method according to claim 6, further comprising: displaying the first touch point, the second touch point, the third touch point, and the fourth touch point on the touch-control screen. ### Claim 11 (depends on 7) The aligning method according to claim 7, further comprising: displaying the first touch point, the second touch point, the third touch point, and the fourth touch point on the touch-control screen. ### Claim 12 (depends on 8) The aligning method according to claim 8, further comprising: displaying the first touch point, the second touch point, the third touch point, and the fourth touch point on the touch-control screen. ### Claim 13 (depends on 5) The aligning method according to claim 5, wherein after detecting the first touch point and the second touch point occurred on the touch-control screen, further comprising: detecting a variation of the first touch point and the second touch point; and adjusting the first straight line according to the variation of the first touch point and the second touch point. ### Claim 14 (depends on 5) The aligning method according to claim 5, wherein after detecting the third touch point and the fourth touch point occurred on the touch-control screen, further comprising: detecting a variation of the third touch point and the fourth touch point; and adjusting the second straight line according to the variation of the third touch point and the fourth touch point. ### Claim 15 An aligning method for use in a semiconductor inspection apparatus, wherein the semiconductor inspection apparatus comprises a stage and a touch-control screen, wherein the aligning method comprises: displaying an image of a device under test (DUT) supported by the stage on the touch-control screen; detecting a first touch track occurred on the touch-control screen, and defining a first straight line according to the first touch track; detecting a second touch track occurred on the second-touch screen, and defining a second straight line according to the second touch track; calculating an included angle defined by the first straight line and the second straight line; and rotating the stage according to the included angle. ### Claim 16 (depends on 15) The aligning method according to claim 15, wherein after defining the first straight line according to the first touch track, the method further comprises: displaying the first straight line on the touch-control screen for a preset time, and detecting the second touch track occurred on the touch-control screen only when in the preset time. ### Claim 17 (depends on 16) The aligning method according to claim 16, wherein after defining the second straight line according to the second touch track, the method further comprises: displaying the second straight line on the touch-control screen.