# US 2019/0171121 A1 · Mark detection apparatus, mark detection method, measurement apparatus, exposure apparatus, exposure method and device manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0171121 A1 - Document ID: US20190171121A1 - Status: Published application - Kind: A1 - Application number: 16/300,291 - Filed: 2017-05-30 - Published: 2019-06-06 - Earliest claimed: 2016-05-31 - Assignees: Nikon Corporation - Applicants: Nikon Corporation - Inventors: Shigeki EGAMI; Yoshifumi NAKAKOJI - Web page: https://patentgrep.com/patent/US20190171121A1 ## CPC - G03F 9/7088: {Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection} - G01B 11/00: Measuring arrangements characterised by the use of optical techniques - G01B 11/002: {for measuring two or more coordinates} - G03F 7/20: Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) - G03F 7/70141: {Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system} - G03F 9/00: Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) - G03F 9/7049: {Technique, e.g. interferometric} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ## Abstract A mark detection apparatus is configured to detect a mark formed in a mark area of an object and has: a first optical system configured to emit a first measurement light to the mark area; a second optical system configured to irradiate the mark area with at least one part of a zeroth-order light and a diffracted light generated by an irradiation to the mark area from the first optical system; and a light receiver that configured to optically receive at least one part of a zeroth-order light and a diffracted light generated by an irradiation to the mark area from the second optical system. ## Claims ### Claim 1 A mark detection apparatus that is configured to detect a mark formed in a mark area of an object, the mark detection apparatus comprising: a first optical system that is configured to emit a first measurement light to the mark area; a second optical system that is configured to deflect a second measurement light including at least one part of a zeroth-order light and a diffracted light generated by an irradiation of the first measurement light to the mark area from the first optical system and to irradiate the mark area with the deflected second measurement light as a third measurement light; and a light receiver that is configured to optically receive a fourth measurement light including at least one part of a zeroth-order light and a diffracted light generated by an irradiation of the third measurement light to the mark area from the second optical system. ### Claim 2 (depends on 1) The mark detection apparatus according to claim 1, wherein the second optical system is configured to parallelize the second measurement light from the mark area and the third measurement light with which the mark area is irradiated. ### Claim 3 (depends on 1) The mark detection apparatus according to claim 1, wherein the second optical system is configured to deflect the second measurement light from at least one part of the mark area and to irradiate the at least one part of the mark area with the deflected second measurement light as the third measurement light ### Claim 4 (depends on 1) The mark detection apparatus according to claim 1, wherein the second optical system has a reflective surface that reflects the second measurement light from the mark area toward the mark area as the third measurement light. ### Claim 5 (depends on 4) The mark detection apparatus according to claim 4, wherein a shape of a cross-sectional surface of the reflective surface of the second optical system including an optical axis is a shape corresponding to at least one part of an outer circumference of a circle, the mark area is located at a center of the circle. ### Claim 6 (depends on 4) The mark detection apparatus according to claim 4, wherein the reflective surface of the second optical system includes at least two planar reflective surfaces that are perpendicular to each other. ### Claim 7 (depends on 4) The mark detection apparatus according to claim 4, wherein the second optical system has an aperture through which the fourth measurement light from the mark area passes. ### Claim 8 (depends on 1) The mark detection apparatus according to claim 1, wherein the first optical system includes a first optical member that is configured to guide the first measurement light to the mark area and to guide the fourth measurement light to the light receiver. ### Claim 9 (depends on 8) The mark detection apparatus according to claim 8, wherein the first optical member is configured to guide the first measurement light to the mark area by reflecting or refracting the first measurement light and to guide the fourth measurement light to the light receiver by reflecting or refracting the fourth measurement light. ### Claim 10 (depends on 1) The mark detection apparatus according to claim 1, wherein an optical path of the second measurement light and an optical path of the third measurement light are symmetric with respect to an optical axis of the second optical system. ### Claim 11 (depends on 10) The mark detection apparatus according to claim 10, wherein the second optical system has a deflecting optical system that is configured to deflect the second measurement light and a returning optical system that is configured to return the second measurement light from the deflecting optical system. ### Claim 12 (depends on 11) The mark detection apparatus according to claim 11, wherein an optical path of the second measurement light entering the returning optical system is parallel with an optical path of the second measurement light emitted from the returning optical system. ### Claim 13 (depends on 1) The mark detection apparatus according to claim 1, wherein the first optical system has a second optical member that is configured to guide the first measurement light to the mark area so that the first measurement light enters the mark area from an oblique direction. ### Claim 14 (depends on 13) The mark detection apparatus according to claim 13, wherein the second optical member includes a first optical element that is configured to guide the first measurement light to the mark area by refracting the first measurement light so that the first measurement light enters from the oblique direction. ### Claim 15 (depends on 13) The mark detection apparatus according to claim 13, wherein the second optical member includes a second optical element that is configured to guide the first measurement light to the mark area by reflecting the first measurement light so that the first measurement light enters from the oblique direction. ### Claim 16 (depends on 13) The mark detection apparatus according to claim 13, wherein the second optical member allows the first measurement light to enter the mark area from the oblique direction by diverging the first measurement light from an optical axis of the first optical system and then converging the diverged first measurement light to the optical axis of the first optical system. ### Claim 17 (depends on 16) The mark detection apparatus according to claim 16, wherein the second optical member includes: a third optical element that is configured to reflect the first measurement light so that the first measurement light is diverged from the optical axis of the first optical system; and a fourth optical element that is configured to reflect the first measurement light reflected by the third optical element so that the first measurement light is converged to the optical axis of the first optical system and to allow the first measurement light to enter the mark area from the oblique direction. ### Claim 18 (depends on 17) The mark detection apparatus according to claim 17, wherein the third optical element and at least one part of an optical element of the second optical system are unified. ### Claim 19 (depends on 13) The mark detection apparatus according to claim 13, wherein the second optical member is further configured to converge, to an optical axis of the first optical system, the fourth measurement light from the mark area that is diverged from the optical axis. ### Claim 20 (depends on 19) The mark detection apparatus according to claim 19, wherein the second optical member includes: a fifth optical element that is configured to reflect the fourth measurement light from the mark area that is diverged from the optical axis of the first optical system so that the fourth measurement light is converged to the optical axis; and a sixth optical element that is configured to reflect the fourth measurement light reflected by the third optical element. ### Claim 21 (depends on 20) The mark detection apparatus according to claim 20, wherein the sixth optical element and at least one part of an optical element of the second optical system are unified. ### Claim 22 (depends on 1) The mark detection apparatus according to claim 1, wherein the first measurement light includes a fifth measurement light and a sixth measurement light, an angle between the fifth measurement light traveling to the mark area and an optical axis of the first optical system is different from an angle between the sixth measurement light traveling to the mark area and the optical axis of the first optical system. ### Claim 23 (depends on 22) The mark detection apparatus according to claim 22, wherein an absolute value of the angle between the fifth measurement light and the optical axis of the first optical system is same as an absolute value of the angle between the sixth measurement light and the optical axis of the first optical system. ### Claim 24 (depends on 22) The mark detection apparatus according to claim 22, wherein an absolute value of the angle between the fifth measurement light and the optical axis of the first optical system is different from an absolute value of the angle between the sixth measurement light and the optical axis of the first optical system. ### Claim 25 (depends on 1) The mark detection apparatus according to claim 1, wherein the fourth measurement light includes at least one of a reflected light and a diffracted light of the first measurement light emitted from the first optical system, the diffracted light of the first measurement light includes at least one part of a zeroth-order light and a diffracted light generated by an irradiation of the third measurement light. ### Claim 26 (depends on 1) The mark detection apparatus according to claim 1, wherein the light receiver is configured to optically receive an interfering light of the fourth measurement light. ### Claim 27 (depends on 26) The mark detection apparatus according to claim 26, wherein the interfering light includes an interfering light generated by an interference between a N1 (N1 is an integer other than zero) order diffracted light of the first measurement light and a −N1 order diffracted light of the first measurement light. ### Claim 28 (depends on 26) The mark detection apparatus according to claim 26, wherein the interfering light includes an interfering light generated by an interference between a reflected light of the first measurement light and a N2 (N2 is an integer other than zero) order diffracted light of the first measurement light. ### Claim 29 (depends on 1) The mark detection apparatus according to claim 1, wherein the light receiver is configured to optically receive an interfering light generated by an interference between a light diffracted at the mark area a plurality of times and a zeroth-order light at the mark area. ### Claim 30 (depends on 1) The mark detection apparatus according to claim 1, wherein the light receiver is configured to optically receive a plurality of fourth measurement lights from the mark area. ### Claim 31 (depends on 30) The mark detection apparatus according to claim 30, wherein the mark detection apparatus is configured to correct a light receiving result of the plurality of fourth measurement lights from the mark area on the basis of the light receiving result. ### Claim 32 (depends on 30) The mark detection apparatus according to claim 30, wherein the first measurement light includes a fifth measurement light and a sixth measurement light, the light receiver is configured to optically receive an interfering light generated by an interference between a reflected light of the fifth measurement light and a diffracted light of the sixth measurement light and an interfering light generated by an interference between a reflected light of the sixth measurement light and a diffracted light of the fifth measurement light. ### Claim 33 (depends on 30) The mark detection apparatus according to claim 30, wherein the first measurement light includes a fifth measurement light and a sixth measurement light, the light receiver is configured to optically receive an interfering light generated by an interference between a reflected light of the fifth measurement light and a diffracted light of the fifth measurement light and an interfering light generated by an interference between a reflected light of the sixth measurement light and a diffracted light of the sixth measurement light. ### Claim 34 (depends on 30) The mark detection apparatus according to claim 30, wherein the light receiver has: a first light receiving surface that is configured to optically receive an interfering light generated by an interference between a plurality of diffracted lights that are generated by the irradiation of the third measurement light to the mark area; and a second and third light receiving surfaces that are configured to optically receive the plurality of diffracted lights that are generated by the irradiation of the third measurement light to the mark area, respectively. ### Claim 35 (depends on 34) The mark detection apparatus according to claim 34, wherein the mark detection apparatus further comprising a stage that is configured to hold the object, the stage is movable along an optical axis of the second optical system so that a state of a focus of the measurement light emitted from the first optical system is changed between a state where the measurement light is focused on the mark area and a state where the measurement light is not focused on the mark area. ### Claim 36 (depends on 1) The mark detection apparatus according to claim 1, wherein the first optical system is configured to emit the first measurement light including a plurality of light components that have different wavelengths, respectively. ### Claim 37 (depends on 36) The mark detection apparatus according to claim 36, wherein the second optical system is configured to align a traveling direction of the light component having a first wavelength in the fourth measurement light and a traveling direction of the light component having a second wavelength different from the first wavelength in the fourth measurement light. ### Claim 38 (depends on 36) The mark detection apparatus according to claim 36, wherein the second optical system is configured to irradiate a same position in the mark area with the light component having a first wavelength in the third measurement light and the light component having a second wavelength different from the first wavelength in the third measurement light. ### Claim 39 (depends on 36) The mark detection apparatus according to claim 36, wherein the second optical system is configured to deflect the light component that has a first wavelength and that is emitted at a first angle from the mark area in the second measurement light and the light component that has a second wavelength different from the first wavelength and that is emitted at a second angle different from the first angle from the mark area in the second measurement light and to irradiate a same position in the mark area with the deflected light components as the third measurement light. ### Claim 40 (depends on 36) The mark detection apparatus according to claim 36, wherein the second optical system is configured to deflect the light component that has a first wavelength and that is emitted at a first angle from the mark area in the second measurement light and the light component that has a second wavelength different from the first wavelength and that is emitted at a second angle different from the first angle from a position from which the light component having the first wavelength is emitted in the second measurement light and to irradiate a same position in the mark area with the deflected light components as the third measurement light. ### Claim 41 (depends on 36) The mark detection apparatus according to claim 36, wherein the plurality of light components include a light component having a first wavelength and a light component having a second wavelength, a difference between the first wavelength and the second wavelength is at least 100 nm. ### Claim 42 (depends on 36) The mark detection apparatus according to claim 36, wherein the light receiver has a plurality of light receiving surfaces for detecting the plurality of light components, respectively. ### Claim 43 A mark detection apparatus that is configured to detect a mark formed in a mark area of an object, the mark detection apparatus comprising: a first optical system that is configured to emit a first measurement light to the mark area; a second optical system that is configured to deflect a second measurement light including a diffracted light generated by an irradiation of the first measurement light to the mark area from the first optical system and to irradiate the mark area with the deflected second measurement light as a third measurement light; and a light receiver that is configured to optically receive a fourth measurement light including a diffracted light generated by an irradiation of the third measurement light to the mark area from the second optical system. ### Claim 44 (depends on 43) The mark detection apparatus according to claim 43, wherein an optical path of the second measurement light and an optical path of the third measurement light are symmetric with respect to an optical axis of the second optical system. ### Claim 45 (depends on 44) The mark detection apparatus according to claim 44, wherein the second optical system has a deflecting optical system that is configured to deflect the second measurement light and a returning optical system that is configured to return the second measurement light from the deflecting optical system. ### Claim 46 (depends on 45) The mark detection apparatus according to claim 45, wherein an optical path of the second measurement light entering the returning optical system is parallel with an optical path of the second measurement light emitted from the returning optical system. ### Claim 47 (depends on 43) The mark detection apparatus according to claim 43, wherein the first measurement light includes a fifth measurement light and a sixth measurement light, an angle between the fifth measurement light traveling to the mark area and an optical axis of the first optical system is different from an angle between the sixth measurement light traveling to the mark area and the optical axis of the first optical system. ### Claim 48 (depends on 47) The mark detection apparatus according to claim 47, wherein an absolute value of the angle between the fifth measurement light and the optical axis of the first optical system is same as an absolute value of the angle between the sixth measurement light and the optical axis of the first optical system. ### Claim 49 (depends on 47) The mark detection apparatus according to claim 47, wherein an absolute value of the angle between the fifth measurement light and the optical axis of the first optical system is different from an absolute value of the angle between the sixth measurement light and the optical axis of the first optical system. ### Claim 50 (depends on 43) The mark detection apparatus according to claim 43, wherein the light receiver is configured to optically receive an interfering light generated by an interference between a light diffracted at the mark area a plurality of times and a zeroth-order light at the mark area. ### Claim 51 A mark detection apparatus that is configured to detect a mark formed in a mark area of an object, the mark detection apparatus comprising: a first optical system that is configured to emit a measurement light to the mark area, the measurement light including a plurality of light components having different wavelengths, respectively; and a light receiver that is configured to optically receive at least one part of the measurement light through the mark area, the light receiver having a plurality of light receiving surfaces for detecting the plurality of light components, respectively. ### Claim 52 (depends on 51) The mark detection apparatus according to claim 51 further comprising a spectroscope that is configured to dispersing the measurement light through the mark area depending on the wavelength, the light receiver being configured to detect the measurement light dispersed by the spectroscope. ### Claim 53 (depends on 52) The mark detection apparatus according to claim 52 comprising: a plurality of light receivers that are configured to optically receive a plurality of measurement lights from the mark area, respectively; and a plurality of spectroscopes that corresponds to the plurality of light receivers, respectively. ### Claim 54 (depends on 53) The mark detection apparatus according to claim 53, wherein the plurality of measurement lights from the mark area are used to measure a position of the mark in a first direction and a position of the mark in a second direction that is different from the first direction. ### Claim 55 (depends on 54) The mark detection apparatus according to claim 54, wherein the plurality of measurement lights include a seventh measurement light that is used to measure the position of the mark in the first direction and a eighth measurement light that is used to measure the position of the mark in the second direction, the plurality of spectroscopes include a first spectroscope that is configured to disperse a ninth measurement light generated from the mark area to which the seventh measurement light is irradiated depending on the wavelength and a second spectroscope that is configured to disperse a tenth measurement light generated from the mark area to which the eighth measurement light is irradiated depending on the wavelength, the plurality of light receivers include a first light receiver that is configured to optically receive the ninth measurement light dispersed by the first spectroscope and a second light receiver that is configured to optically receive the tenth measurement light dispersed by the second spectroscope. ### Claim 56 A mark detection apparatus that is configured to detect a mark formed in a mark area of an object, the mark detection apparatus comprising: a first optical system that is configured to emit a measurement light to the mark area, the measurement light including a plurality of light components having different wavelengths, respectively; a second optical system that is configured to align a traveling direction of the light component having a first wavelength in the measurement light from the mark area and a traveling direction of the light component having a second wavelength different from the first wavelength in the measurement light from the mark area and to emit the light component having the first wavelength and the light component having the first wavelength; and a light receiver that is configured to optically receive at least one part of the measurement light from the second optical system. ### Claim 57 (depends on 56) The mark detection apparatus according to claim 56, wherein the second optical system is configured to irradiate the mark area with at least one part of a zeroth-order light and a diffracted light generated by the irradiation to the mark area from the first optical system. ### Claim 58 (depends on 57) The mark detection apparatus according to claim 57, wherein the second optical system is configured to guide, to the light receiver, at least one part of the zeroth-order light and the diffracted light generated by the irradiation to the mark area from the second optical system. ### Claim 59 (depends on 1) A measurement apparatus that is configured to measure a position of a mark formed in a mark area of an object, the measurement apparatus comprising: a stage that is configured to hold the object; the mark detection apparatus according to claim 1, a stage position measuring system that is configured to measure a position of the stage; and a calculating apparatus that is configured to calculate the position of the mark by using a light receiving result of the light receiver and a measured result of the stage position measuring system. ### Claim 60 A mark detection method of detecting a mark formed in a mark area of an object, the mark detection method comprising: emitting a first measurement light to the mark area; deflecting a second measurement light including at least one part of a zeroth-order light and a diffracted light generated by an irradiation of the first measurement light to the mark area from the first optical system and irradiating the mark area with the deflected second measurement light as a third measurement light; and optically receiving a fourth measurement light including at least one part of a zeroth-order light and a diffracted light generated by an irradiation of the third measurement light to the mark area. ### Claim 61 A mark detection method of detecting a mark formed in a mark area of an object, the mark detection method comprising: emitting a measurement light to the mark area, the measurement light including a plurality of light components having different wavelengths, respectively; aligning a traveling direction of the light component having a first wavelength in the measurement light from the mark area and a traveling direction of the light component having a second wavelength different from the first wavelength in the measurement light from the mark area and emitting the light component having the first wavelength and the light component having the first wavelength; and optically receiving at least one part of the emitted measurement light. ### Claim 62 (depends on 59) An exposure apparatus that is configured to expose an object by using a measured result of the measurement apparatus according to claim 59. ### Claim 63 (depends on 59) An exposure method of exposing an object by using a measured result of the measurement apparatus according to claim 59. ### Claim 64 (depends on 63) A device manufacturing method of: exposing the object on which a sensitive agent is coated by using the exposure method according to claim 63 and transferring a desired patter on the object; developing the exposed sensitive agent and forming a exposure pattern layer corresponding to the desired pattern; and processing the object via the exposure pattern layer.