# US 2019/0171032 A1 · Mems-based optical image stabilization

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- Number: US 2019/0171032 A1
- Document ID: US20190171032A1
- Status: Published application
- Kind: A1
- Application number: 16/272,159
- Filed: 2019-02-11
- Published: 2019-06-06
- Earliest claimed: 2011-09-28
- Assignees: DigitalOptics Corporation MEMS
- Applicants: DigitalOptics Corporation MEMS
- Inventors: Xiaolei LIU; Roman C. GUTIERREZ; Pat K. LEANG; Jose A. MENDEZ; Corneliu ZAHARIA; Alexandru F. DRIMBAREAN; Petronel Gheorghe BIGIOI
- Web page: https://patentgrep.com/patent/US20190171032A1

## CPC

- G02B 27/646: {compensating for small deviations, e.g. due to vibration or shake (movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68)}
- G02B 26/0841: {the reflecting element being moved or deformed by electrostatic means}
- G02B 27/64: Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
- G03B 5/00: Adjustment of optical system relative to image or object surface other than for focusing
- H04N 23/68: for stable pick-up of the scene, e.g. compensating for camera body vibrations
- H04N 23/6812: {based on additional sensors, e.g. acceleration sensors}
- H04N 23/687: {by shifting the lens or sensor position}
- G03B 2205/0015: by displacing one or more optical elements normal to the optical axis
- G03B 2205/0084: using other types of actuators
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR (optical parts of such apparatus G02B; photosensitive materials or processes for photographic purposes G03C; apparatus for processing exposed photographic materials G03D)
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION

## Abstract

In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.

## Claims

### Claim 1

A camera, comprising:
a plurality of electrostatic actuators, each actuator configured to exert a force on at least one lens; and
an optical image stabilization (OIS) algorithm module configured to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.

### Claim 2 (depends on 1)

The camera of claim 1, wherein each actuator is configured to exert a tangential force on the at least one lens, and wherein the OIS algorithm module is configured to command the plurality of actuators to tangentially actuate the at least one lens responsive to the motion of the camera.

### Claim 3 (depends on 2)

The camera of claim 2, further comprising:
a plurality of position sensors corresponding to the plurality of actuators, each position sensor measuring a tangential displacement of its corresponding actuator, and
a translator module operable to translate the tangential displacements from the position sensors into a displacement for the lens, wherein the OIS algorithm module is also responsive to the lens displacement.

### Claim 4 (depends on 1)

The camera of claim 1, further comprising:
a driver integrated circuit operable to drive the actuators responsive to the OIS algorithm module's commands, wherein the OIS algorithm module is integrated in the driver integrated circuit.

### Claim 5 (depends on 1)

The camera of claim 1, further comprising:
an imager configured to digitize an image taken through the at least one lens; and
an image processor integrated circuit operable to process the digitized image, wherein the OIS algorithm module is integrated in the image processor integrated circuit.

### Claim 6 (depends on 1)

The camera of claim 1, wherein the camera is integrated into a cellular telephone.

### Claim 7 (depends on 6)

The camera of claim 6, wherein the actuators are electrostatic comb actuators.

### Claim 8 (depends on 7)

The camera of claim 7, further comprising:
a circular stage to receive the at least one lens, wherein the plurality of actuators comprises three actuators symmetrically disposed outside of the circular stage.

### Claim 9 (depends on 1)

The camera of claim 1, wherein the OIS algorithm module includes a Kalman filter for predicting an intended motion of the camera.

### Claim 10 (depends on 9)

The camera of claim 9, further comprising:
a gyroscope, wherein the gyroscope measures a pitch and yaw of the camera, and wherein the Kalman filter predicts an intended motion of the camera based the measured pitch and yaw.

### Claim 11 (depends on 1)

The camera of claim 1, wherein the OIS algorithm module commands the plurality of actuators based upon a relatively low data rate, and wherein the camera further includes at least one controller for controlling the actuators at a relatively high data rate based upon the OIS algorithm module commands.

### Claim 12

A method of image stabilization, comprising:
sensing a motion of a camera;
based upon the sensed motion, determining a desired lens actuation that stabilizes a camera lens;
translating the desired lens actuation into desired tangential actuations; and
tangentially actuating the at least one lens using a plurality of tangential actuators according to the desired tangential actuations.

### Claim 13 (depends on 12)

The method of claim 12, wherein the camera motion is sensed using a gyroscope, the method further comprising:
filtering sensed camera motion from the gyroscope to provide a prediction of an intended position for the lens;
sensing tangential actuations by the plurality of tangential actuations;
translating the tangential actuations into a current lens position; and
subtracting the current lens position from the intended lens position to provide a lens position error due to unintended camera motion, wherein the desired lens actuation stabilizes the lens by addressing the unintended camera motion.

### Claim 14 (depends on 13)

The method of claim 13, wherein the filtering is a Kalman filtering.

### Claim 15 (depends on 13)

The method of claim 13, wherein the filtering is a high pass filtering.

### Claim 16 (depends on 13)

The method of claim 13, wherein the tangential actuation is a MEMS electrostatic comb tangential actuation.

### Claim 17

A system, comprising:
a lens;
a stage holding the lens within a curved aperture;
three tangential actuators symmetrically disposed about the stage, each tangential actuator operable to displace the stage in a direction tangential to a curve defined by the curved aperture; and
an optical image stabilization (OIS) algorithm module operable to derive an actuation command for each of the three tangential actuators responsive to motion of the camera.

### Claim 18 (depends on 17)

The system of claim 17, wherein the curved aperture is a circle and the curve defined by curved aperture is a circle.

### Claim 19 (depends on 17)

The system of claim 17, further comprising three V-shaped flexures corresponding to the three tangential actuators, wherein each tangential actuator couples to the stage through the corresponding V-shaped flexure.

### Claim 20 (depends on 19)

The system of claim 19, wherein each V-shaped flexure has a longitudinal axis aligned in the direction tangential to the curve.