# US 2019/0171002 A1 · Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

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- Number: US 2019/0171002 A1
- Document ID: US20190171002A1
- Status: Published application
- Kind: A1
- Application number: 16/260,478
- Filed: 2019-01-29
- Published: 2019-06-06
- Earliest claimed: 2015-04-01
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Satoshi ITO
- Web page: https://patentgrep.com/patent/US20190171002A1

## CPC

- G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)}
- G02B 26/008: {in the form of devices for effecting sequential colour changes, e.g. colour wheels}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An electro-optical device is configured by a laminated body of a second conductive layer and a reflective layer for a mirror. The second conductive layer includes a mirror support post facing a concave portion at a side opposite to a substrate, and a flat plate which extends from an end portion of the mirror support post and faces the substrate. The concave portion is filled with the resin. Surfaces of the flat plate and the resin configure a continuous plane. The reflective layer for a mirror is laminated on a surface of the resin at a side opposite to the substrate, and a surface of the flat plate of the second conductive layer at a side opposite to the substrate.

## Claims

### Claim 1

An electro-optical device comprising:
a substrate;
a torsion hinge disposed above the substrate;
a conductive layer disposed above the torsion hinge;
a support post which protrudes from the conductive layer to the torsion hinge, and which includes a resin; and
a reflective layer which completely covers a surface of the conductive layer and the resin, the reflective layer contacting the resin,
wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the conductive layer at a side opposite to the substrate is equal to 0.2 μm or less, and
wherein a depth of the support post is larger than an inner diameter of the support post.

### Claim 2

An electro-optical device comprising:
a substrate;
a torsion hinge disposed above the substrate;
a flat plate disposed on the torsion hinge;
a supporting portion in which a resin is filled in a recess protruding from the flat plate toward the torsion hinge; and
a reflective layer which completely covers a surface of the flat plate in a plan view,
wherein a height of the resin is larger than a diameter of the resin, and
wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the flat plate at a side opposite to the substrate is equal to 0.2 μm or less.

### Claim 3 (depends on 1)

An electronic apparatus comprising:
the electro-optical device according to claim 1; and
a light source unit which emits light source light to the reflective layer.

### Claim 4 (depends on 2)

An electronic apparatus comprising:
the electro-optical device according to claim 2; and
a light source unit which emits light source light to the reflective layer.

### Claim 5

An electro-optical device comprising:
a substrate;
a torsion hinge disposed above the substrate;
a conductive layer disposed above the torsion hinge; and
a reflective layer disposed on the conductive layer, wherein
the conductive layer includes a support post and flat plate,
the support post is formed continuously with the flat plate, protrudes toward the torsion hinge and contacts the torsion hinge,
the reflective layer contacts the flat plate, and
A>B, wherein
A is a thickness of the flat plate, and
B is a thickness of the reflective layer.

### Claim 6 (depends on 5)

The electro-optical device according to claim 5, wherein the support post is filled with a resin.

### Claim 7 (depends on 6)

The electro-optical device according to claim 6, wherein the resin is surrounded by the support post and the reflective layer.

### Claim 8 (depends on 6)

The electro-optical device according to claim 6, wherein the reflective layer contacts the resin.