# US 2019/0171001 A1 · Thermal driven mems tunable filter > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0171001 A1 - Document ID: US20190171001A1 - Status: Published application - Kind: A1 - Application number: 15/830,834 - Filed: 2017-12-04 - Published: 2019-06-06 - Earliest claimed: 2017-12-04 - Assignees: Agiltron, Inc. - Applicants: Agiltron, Inc. - Inventors: Guanghai Jin; Congshun Wang; Luzhong Yin; Jing Zhao - Web page: https://patentgrep.com/patent/US20190171001A1 ## CPC - G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)} - G01J 3/0256: {Compact construction} - G01J 3/26: using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters - G01J 3/2823: {Imaging spectrometer} - G02B 6/29358: {Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator (G02B6/29347, G02B6/29349, G02B6/2935, G02B6/29361 take precedence; resonator evanescently coupled to light guide G02B6/29335)} - G02B 6/29361: {Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters} - G02B 6/29395: {configurable, e.g. tunable or reconfigurable (switching G02B6/35)} - G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)} - G02B 6/2938: {for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) ## Abstract A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel. ## Claims ### Claim 1 A tunable etalon filter device, comprising: a substrate mirror secured to a substrate and a top mirror forming an optical cavity therebetween; at least two electrically conductive silicon beams, each comprising: a center section, the entire center section having a first thickness; two end sections separated by the center section, the entire thickness of each end section being a second thickness less than the first thickness, and each end section being fixed to the substrate with an elevated supporting post; and a bridge connecting the center section with the top mirror; wherein each silicon beam and the connected top mirror moves in a direction perpendicular to the substrate upon passing an electrical current through the electrically conductive silicon beam. ### Claim 2 (depends on 1) The tunable etalon filter device of claim 1, wherein the center section of the beam is thinner than the ends. ### Claim 3 (depends on 2) The tunable etalon filter device of claim 2, wherein the center section comprises a notch formed in a top surface thereof. ### Claim 4 (depends on 2) The tunable etalon filter device of claim 2, wherein the center section comprises a notch formed in a bottom surface thereof. ### Claim 5 (canceled) ### Claim 6 (depends on 1) The tunable etalon filter device of claim 1, wherein each end section is formed as a single notch in a top surface of the beam. ### Claim 7 (depends on 1) The tunable etalon filter device of claim 1, wherein each end section is formed as a single notch in a bottom surface of the beam. ### Claim 8 (depends on 1) The tunable etalon filter device of claim 1, wherein the top mirror is made from a silicon on isolator wafer. ### Claim 9 (depends on 1) The tunable etalon filter device of claim 1, wherein the supporting posts comprise thermal isolation between the substrate and the electrically conductive silicon beam. ### Claim 10 (depends on 1) The tunable etalon filter device of claim 1, further comprising gold metal deposited on the supporting posts whereby current passes through the electrically conductive beams. ### Claim 11 (depends on 1) The tunable etalon filter device of claim 1, whereby the filter device is tunable by moving the top mirror with controlling voltages through the beams. ### Claim 12 An optical spectrometer, comprising: a tunable etalon filter device, comprising: a substrate mirror secured to a substrate and a top mirror forming an optical cavity therebetween; and at least two electrically conductive silicon beams, each comprising: a center section, the entire center section having a first thickness; two end sections separated by the center section, the entire thickness of each end section being a second thickness less than the first thickness, and each end section being fixed to the substrate with an elevated supporting post; and a bridge connecting the center section with the top mirror; wherein each silicon beam and the connected top mirror moves in a direction perpendicular to the substrate upon passing an electrical current through the electrically conductive silicon beam; and a photo detector optically coupled with the etalon tunable etalon filter device. ### Claim 13 A fiber optical wavelength division multiplexer, comprising: two fiber collimators; and an tunable etalon filter device optically coupled between the two fiber collimators, the tunable etalon filter device comprising: a substrate mirror secured to a substrate and a top mirror forming an optical cavity therebetween; and at least two electrically conductive silicon beams, each comprising: a center section, the entire center section having a first thickness; two end sections separated by the center section, the entire thickness of each end section being a second thickness less than the first thickness, and each end section being fixed to the substrate with an elevated supporting post; and a bridge connecting the center section with the top mirror; wherein each silicon beam and the connected top mirror moves in a direction perpendicular to the substrate upon passing an electrical current through the electrically conductive silicon beam. ### Claim 14 (depends on 1) The tunable etalon filter device of claim 1, wherein bottom surfaces of the center section and the two end sections comprise a single continuous surface. ### Claim 15 (depends on 1) The tunable etalon filter device of claim 1, wherein top surfaces of the center section and the two end sections comprise a single continuous surface. ### Claim 16 (depends on 12) The optical spectrometer of claim 12, wherein each end section is formed as a single notch in a top surface of the beam. ### Claim 17 (depends on 12) The optical spectrometer of claim 12, wherein each end section is formed as a single notch in a bottom surface of the beam. ### Claim 18 (depends on 13) The optical spectrometer of claim 13, wherein each end section is formed as a single notch in a top surface of the beam. ### Claim 19 (depends on 13) The optical spectrometer of claim 13, wherein each end section is formed as a single notch in a bottom surface of the beam.