# US 2019/0170995 A1 · Arrangement for microscopy and for correction of aberrations

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- Number: US 2019/0170995 A1
- Document ID: US20190170995A1
- Status: Published application
- Kind: A1
- Application number: 16/313,645
- Filed: 2017-06-29
- Published: 2019-06-06
- Earliest claimed: 2016-07-01
- Assignees: Carl Zeiss Microscopy GmbH
- Applicants: Carl Zeiss Microscopy GmbH
- Inventors: Dr. Jörg SIEBENMORGEN; Helmut LIPPERT; Thomas KALKBRENNER; Ingo KLEPPE; Ralf WOLLESCHENSKY; Artur DEGEN; Matthias WALD; Lars-Christian WITTIG; Michael GÖLLES; Wolfgang SINGER
- Web page: https://patentgrep.com/patent/US20190170995A1

## CPC

- G02B 21/361: {Optical details, e.g. image relay to the camera or image sensor (G02B21/364 takes precedence; illumination details G02B21/06 and subgroups)}
- G02B 21/0032: {Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06)}
- G02B 21/0076: {arrangements using fluorescence or luminescence}
- G02B 21/02: Objectives
- G02B 21/04: involving mirrors
- G02B 21/06: Means for illuminating specimens
- G02B 21/16: adapted for ultraviolet illumination {; Fluorescence microscopes (G02B21/0076 takes precedence)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An arrangement for microscopy, having an illumination optical unit with an illumination objective for illuminating a specimen situated on a specimen carrier in a specimen region of a specimen plane via an illumination beam path. An optical axis of the illumination objective lies in a plane which includes an illumination angle that differs from zero with the normal of a specimen plane, in respect of which the specimen carrier is aligned, and the illumination is implemented in the plane. Further, a detection optical unit with a detection objective is located in a detection beam path. The optical axis of the detection objective includes a detection angle that differs from zero with the normal of the specimen plane. The illumination objective and/or the detection objective comprises an illumination correction element arranged in the beam path and/or a detection correction element. A meniscus lens is located between the specimen carrier and the illumination and detection objectives, said meniscus lens being arranged both in the illumination beam path and in the detection beam path and being configured to correct aberrations. The illumination correction element and/or the detection correction element is/are configured to correct remaining aberrations.

## Claims

### Claim 1

An arrangement for microscopy, comprising
an illumination optical unit with an illumination objective for illuminating a specimen situated on a specimen carrier in a specimen region of a specimen plane via an illumination beam path, said illumination objective having an optical axis, wherein said optical axis lies in a plane which includes an illumination angle that differs from zero with the normal of the specimen plane, in respect of which the specimen carrier is aligned, and illumination is implemented in the plane,
a detection optical unit with a detection objective in a detection beam path, said detection objective having a detection optical axis, the detection optical axis includes a detection angle that differs from zero with the normal of the specimen plane,
the illumination objective includes an illumination correction element that is arranged in the illumination beam path or introducible into the illuminating beam path, and/or
the detection objective includes a detection correction element that is arranged in the detection beam path or introducible into the detection beam path,
a meniscus lens being located between the specimen carrier and the illumination and detection objectives, said meniscus lens being arranged both in the illumination beam path and in the detection beam path;
the meniscus lens being configured to correct aberrations that arise on account of the passage through media with different refractive indices of radiation to be detected and/or radiation for illuminating the specimen, and
the illumination correction element and/or the detection correction element being configured to correct remaining aberrations.

### Claim 2 (depends on 1)

The arrangement as claimed in claim 1, wherein the illumination correction element and/or the detection correction element is arranged in a pupil of the illumination objective and/or the detection objective.

### Claim 3 (depends on 1)

The arrangement as claimed in claim 1, wherein a radiation employed for illumination purposes is shaped into a light sheet and directed into the specimen region, and the optical axis of the illumination objective and the light sheet lie in a plane that includes an illumination angle that differs from zero with the normal of the specimen plane.

### Claim 4 (depends on 1)

The arrangement as claimed in claim 1, wherein the illumination correction element and/or the detection correction element is at least one phase plate or a free-form lens.

### Claim 5 (depends on 1)

The arrangement as claimed in claim 1, wherein the illumination correction element and/or the detection correction element is a phase plate for correcting static aberrations and an adaptive mirror or a spatial light modulator is present in the illumination beam path and/or in the detection beam path.

### Claim 6 (depends on 1)

The arrangement as claimed in claim 1, wherein the illumination correction element and/or the detection correction element has an adjustable and adaptive embodiment in respect of its corrective power.

### Claim 7 (depends on 6)

The arrangement as claimed in claim 6, wherein the adaptive illumination correction element and/or the adaptive detection correction element is an Alvarez manipulator, a spatial light modulator, at least one adaptive mirror, at least one tilt lens, at least one sliding lens, at least one deformable optical lens or a combination thereof.

### Claim 8 (depends on 6)

The arrangement as claimed in claim 6, wherein the adaptive illumination correction element and/or the adaptive detection correction element is a spatial light modulator and a cylindrical lens is present in the detection beam path for partial compensation of occurrent astigmatism.

### Claim 9 (depends on 6)

The arrangement as claimed in claim 6, wherein the adaptive detection correction element is an adaptive mirror and a cylindrical lens is present in the illumination beam path and/or detection beam path for partial compensation of occurring aberrations.

### Claim 10 (depends on 1)

The arrangement as claimed in claim 1, further comprising a separation layer system with at least one layer made of a predetermined material with a predetermined thickness, which separates a medium, in which the specimen is situated, from the illumination objective and the detection objective, wherein, by means of a base that is aligned parallel to the specimen plane, the separation layer system is in contact with an immersion medium, at least in the region accessible to the illumination objective and the detection objective for illumination and detection purposes, respectively.

### Claim 11 (depends on 1)

A microscope comprising an arrangement as claimed in claim 1.