# US 2019/0170142 A1 · Enclosure system including wire mesh and thin non-porous membrane panels > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0170142 A1 - Document ID: US20190170142A1 - Status: Published application - Kind: A1 - Application number: 16/323,927 - Filed: 2017-08-19 - Published: 2019-06-06 - Earliest claimed: 2016-08-11 - Assignees: Edwards Limited - Applicants: Edwards Limited - Inventors: Malcolm William Gray - Web page: https://patentgrep.com/patent/US20190170142A1 ## CPC - F04C 28/28: Safety arrangements; Monitoring - F04C 25/02: for producing high vacuum (sealing arrangements F04C27/00; silencing F04C29/06) - F41H 5/0457: {Metal layers in combination with additional layers made of fibres, fabrics or plastics} - F42D 5/045: Detonation-wave absorbing or damping means - E04B 1/92: Protection against other undesired influences or dangers (buildings providing protection against external dangers E04H9/00; shielding against dangerous radiation G21F) - F04D 17/168: {Pumps specially adapted to produce a vacuum} - F04D 19/04: specially adapted to the production of a high vacuum, e.g. molecular pumps - F04C: ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS (engines F03C); ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS - F41H: ARMOUR; ARMOURED TURRETS; ARMOURED OR ARMED VEHICLES; MEANS OF ATTACK OR DEFENCE, e.g. CAMOUFLAGE, IN GENERAL - F42D: BLASTING (fuses, e.g. fuse cords, C06C5/00; {for obtaining fluid from wells E21B43/00; for mining or quarrying E21C37/00; for making tunnels or galleries E21D9/006}; cartridges F42B3/00) - E04B: GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS (border constructions of opening in walls, floors or ceilings E06B1/00; {electromagnetic shielding H05K9/0001}) - F04D: NON-POSITIVE-DISPLACEMENT PUMPS (engine fuel-injection pumps F02M; ion pumps H01J41/12; electrodynamic pumps H02K44/02) ## Abstract An enclosure system may be formed of a lightweight panel with a thin non-porous membrane that enables the extraction and leak detection of hazardous gases from housing equipment such as vacuum pumps, valves, abatement equipment and the like. Additionally, the enclosure system includes a one or multiple layers of wire mesh which prevent projectiles with a high kinetic energy from escaping from the housing equipment thereby minimising the risk of an explosion causing parts or panels to be ejected from the enclosure system. ## Claims ### Claim 1 An enclosure for minimising egress of hazardous gases released from post process chamber equipment during operation thereof, the enclosure comprising: a structural frame describing an outer envelope of post process chamber equipment to be housed therein; an outlet configured to be connected to an extraction system; and a plurality of panels, each panel of the plurality of panels comprising a respective sub-frame to which is connected a respective mesh layer in combination with a respective non-porous membrane layer, the respective mesh and respective non-porous membrane layers of each panel being substantially co-planar with one another, wherein the plurality of panels are mounted to the structural frame in a contiguous manner such that, in use, a pressure internal to the enclosure, lower than that experienced external to the enclosure, can be maintained thereby inhibiting inadvertent egress of any hazardous gases present in the enclosure. ### Claim 2 (depends on 1) The enclosure according to claim 1, wherein one or more panels of the plurality of panels are removably mounted to the structural frame. ### Claim 3 (depends on 1) The enclosure according to claim 1, wherein the respective non-porous membrane layers comprise a rubber or a polymer. ### Claim 4 (depends on 1) The enclosure according to claim 1, wherein the respective non-porous membrane layers are configured to rupture upon catastrophic failure of equipment housed within the enclosure. ### Claim 5 (depends on 4) The enclosure according to claim 4, wherein the thickness of the respective non-porous membrane layers is in the range of 0.05 to 0.5 mm ### Claim 6 (depends on 5) The enclosure according to claim 5, wherein the thickness of the respective non-porous membrane layers is in the range of 0.05 to 0.1 mm. ### Claim 7 (depends on 1) The enclosure according to claim 1, wherein the respective non-porous membrane layers are configured to flap out of plane upon catastrophic failure of equipment housed within the enclosure ### Claim 8 (depends on 0) The enclosure according to claim 0, wherein the thickness of the respective non-porous membrane layers is in the range of 0.5 to 3 mm ### Claim 9 (depends on 0) The enclosure according to claim 0, wherein the thickness of the respective non-porous membrane layers is in the range of 1 to 2 mm. ### Claim 10 (depends on 8) The enclosure according to claim 8, wherein the respective mesh layers are configured to contain projectiles formed upon catastrophic failure of equipment housed within the enclosure. ### Claim 11 (depends on 8) The enclosure according to claim 8, wherein the respective non-porous mesh layers each comprise two sheets of wire mesh. ### Claim 12 (depends on 0) The enclosure according to claim 0, wherein the respective non-porous membrane layers are each provided between the two sheets of wire mesh.