# US 2019/0169747 A1 · Vapor deposition apparatus

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- Number: US 2019/0169747 A1
- Document ID: US20190169747A1
- Status: Published application
- Kind: A1
- Application number: 16/271,189
- Filed: 2019-02-08
- Published: 2019-06-06
- Earliest claimed: 2013-07-25
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Jin-Kwang Kim; Seung-Yong Song; Myung-Soo Huh; Suk-Won Jung; Choel-Min Jang; Jae-Hyun Kim; Sung-Chul Kim
- Web page: https://patentgrep.com/patent/US20190169747A1

## CPC

- C23C 16/45574: {Nozzles for more than one gas}
- C23C 16/45536: {Use of plasma, radiation or electromagnetic fields}
- C23C 16/45551: {for relative movement of the substrate and the gas injectors or half-reaction reactor compartments}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.

## Claims

### Claim 1

A method of manufacturing a display device, the method comprising:
locating a substrate on which an organic light emitting device is provided below a deposition unit; and
forming an encapsulation layer on the substrate, wherein the encapsulation layer comprises an inorganic layer and an organic layer;
wherein forming the inorganic layer comprising:
injecting a first raw material toward the substrate by first nozzle of the deposition unit to form an adsorption layer comprising a chemical adsorption layer and a physical adsorption layer on the substrate;
injecting a purge gas toward the substrate by first purge nozzle of the deposition unit to separate the physical adsorption layer from the substrate; and
injecting a second raw material toward the substrate by second nozzle of the deposition unit, the second raw material react with the chemical adsorption layer to form a thin film on the substrate;
wherein the second raw material supplied to the second nozzle has radical form.

### Claim 2 (depends on 1)

The method of manufacturing a display device as claimed in claim 1, wherein the second raw in the radical form pass through a diffuser unit and supplied to the second nozzle in a vertical direction.

### Claim 3 (depends on 2)

The method of manufacturing a display device as claimed in claim 2, wherein
the diffuser unit comprises a plurality of distribution plates separated from each other in the vertical direction,
the second raw in the radical form pass through holes formed in the plurality of distribution plates and supplied to the second nozzle.

### Claim 4 (depends on 3)

The method of manufacturing a display device as claimed in claim 3, wherein
a number of the holes formed in the plurality of distribution plates increases from an upper portion to a lower portion of the diffuser unit,
a size of the holes formed in the plurality of distribution plates decreases from an upper portion to a lower portion of the diffuser unit.

### Claim 5 (depends on 4)

The method of manufacturing a display device as claimed in claim 4, wherein the second raw in the radical form pass through holes formed in the plurality of distribution plates with a uniform mean transfer distance.

### Claim 6 (depends on 2)

The method of manufacturing a display device as claimed in claim 2, wherein the second raw in the radical form has the radical form before supplied to the diffuser unit.

### Claim 7 (depends on 1)

The method of manufacturing a display device as claimed in claim 1, wherein the second raw injected toward the substrate has a neutral polarity.

### Claim 8 (depends on 1)

The method of manufacturing a display device as claimed in claim 1, wherein the substrate reciprocates below the deposition unit.

### Claim 9 (depends on 1)

The method of manufacturing a display device as claimed in claim 1, further comprising injecting the purge gas toward the substrate by second purge nozzle of the deposition unit to remove by-products from the thin film.

### Claim 10 (depends on 1)

The method of manufacturing a display device as claimed in claim 1, wherein the second raw material comprises an oxygen radical.