# US 2019/0169732 A1 · Tunable masks for uniformity management of pvd coating thickness > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0169732 A1 - Document ID: US20190169732A1 - Status: Published application - Kind: A1 - Application number: 15/829,928 - Filed: 2017-12-03 - Published: 2019-06-06 - Earliest claimed: 2017-12-03 - Inventors: Shiping Cheng - Web page: https://patentgrep.com/patent/US20190169732A1 ## CPC - C23C 14/042: {using masks} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract The tunable mask in the current invention comprises three parts: a mask body, an upper piece, and a lower piece. When these parts are assembled together, either or both of the upper and lower pieces' positions on the mask body can be adjusted to form various shapes of the tunable mask. Different shapes of upper and lower pieces are also available for use. During the coating process in a physical vapor deposition (PVD) system, a single or multiple tunable masks are positioned between the substrate and the evaporation source. Uniformity of the coating thickness on the substrate is improved when the tunable mask provides an optimal shielding effect with a selective shape. ## Claims ### Claim 1 A tunable mask for attachment to a physical vapor deposition system to manage uniformity of the coating thickness on substrate consisting essentially of a mask body with at least one kidney shaped hole and an asymmetrical shape along its longitudinal axis, an upper piece, a lower piece, and at least one fixing screw for affixing the upper piece to the mask body through the kidney shaped hole when the fixing screw is tightened and allowing the upper piece to move and tilt with respect to the mask body when the fixing screw releases. ### Claim 2 (depends on 1) A tunable mask as described in claim 1, wherein the lower piece has a blade, no more than two threaded holes, and no more than two fixing screws, and the upper piece has a blade, at least one threaded hole, and at least one fixing screw that affixes the upper piece to the mask body after being tightened through the kidney shaped hole into the threaded hole. ### Claim 3 (depends on 2) A tunable mask as described in claim 2, wherein scale tick marks are put on either or both sides of the mask. ### Claim 4 (depends on 2) A tunable mask as described in claim 2, wherein the upper piece has a blade with a substantially convex curve. ### Claim 5 (depends on 2) A tunable mask as described in claim 2, wherein the upper piece has a blade with a substantially concave curve. ### Claim 6 (depends on 2) A tunable mask as described in claim 2, wherein the upper piece has a blade with a straight line. ### Claim 7 (depends on 2) A tunable mask as described in claim 2, wherein the lower piece has a blade with a substantially convex curve. ### Claim 8 (depends on 2) A tunable mask as described in claim 2, wherein the lower piece has a blade with a substantially concave curve. ### Claim 9 (depends on 2) A tunable mask as described in claim 2, wherein the lower piece has a blade with a straight line. ### Claim 10 (depends on 2) A tunable mask as described in claim 2, wherein the position of the upper piece on the mask body and the pointing direction of its blade are adjustable. ### Claim 11 (depends on 10) A tunable mask as described in claim 10, wherein the lower piece is an integral part of the mask body. ### Claim 12 (depends on 11) A tunable mask as described in claim 11 having two kidney shaped holes, two threaded holes, and two fixing screws. ### Claim 13 (depends on 12) A tunable mask as described in claim 12, wherein the two kidney shaped holes are opened within an arc rail that is formed on the mask body and the hollow space of the arc rail has the same size and shape as an arc ridge formed on the upper piece; when being put together with the mask body, the arc ridge of the upper piece is embedded in the arc rail of the mask body and the upper piece is able to move along the arc rail before being affixed to the mask body by the fixing screws. ### Claim 14 (depends on 2) A tunable mask as described in claim 2 wherein the mask body has one kidney shaped hole and the upper piece has one threaded hole and one fixing screw. ### Claim 15 (depends on 14) A tunable mask as described in claim 14, wherein the lower piece is an integral part of the mask body. ### Claim 16 (depends on 2) A tunable mask as described in claim 2, wherein the mask body has one kidney shaped hole and two round holes through which two fixing screws are tightened into two threaded holes on the lower piece and affix it to the mask body. ### Claim 17 (depends on 16) A tunable mask as described in claim 16, wherein the mask body has one kidney shaped hole and the upper pieces has one threaded hole and one fixing screw. ### Claim 18 (depends on 2) A tunable mask as described in claim 2, wherein the mask body has two kidney-shaped holes and each of the upper piece and the lower piece is affixed to the mask body by one fixing screw being tightened through the said kidney-shaped holes into the threaded hole on each of the said pieces. ### Claim 19 (depends on 18) A tunable mask as described in claim 18, wherein the position of the lower piece on the mask body and the pointing direction of its blade are adjustable. ### Claim at position 20