# US 2019/0169371 A1 · Triazine-ring-containing polymer and composition including same

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- Number: US 2019/0169371 A1
- Document ID: US20190169371A1
- Status: Published application
- Kind: A1
- Application number: 16/076,084
- Filed: 2017-02-08
- Published: 2019-06-06
- Earliest claimed: 2016-02-09
- Assignees: Nissan Chemical Corporation
- Applicants: Nissan Chemical Corporation
- Inventors: Naoya NISHIMURA
- Web page: https://patentgrep.com/patent/US20190169371A1

## CPC

- G03F 7/0382: {the macromolecular compound being present in a chemically amplified negative photoresist composition}
- C08G 73/0273: {Polyamines containing heterocyclic moieties in the main chain}
- C08G 73/06: Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08L 79/02: Polyamines
- C08L 79/04: Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- G03F 7/032: with binders
- G03F 7/038: Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021)
- G03F 7/039: Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023)
- G03F 7/162: {Coating on a rotating support, e.g. using a whirler or a spinner}
- G03F 7/168: {Finishing the coated layer, e.g. drying, baking, soaking}
- G03F 7/2004: {characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light}
- G03F 7/322: {Aqueous alkaline compositions}
- G03F 7/40: Treatment after imagewise removal, e.g. baking
- C08L 2312/00: Crosslinking
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- C08G: MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08L: COMPOSITIONS OF MACROMOLECULAR COMPOUNDS (compositions based on polymerisable monomers C08F, C08G; artificial filaments or fibres D01F; textile treating compositions D06)

## Abstract

For example, a thin film that has a high refractive index and is capable of forming a fine pattern can be obtained by using a triazine-ring-containing polymer that includes a repeating unit structure represented by formula [4].

## Claims

### Claim 1

A triazine ring-containing polymer comprising a recurring unit structure of formula (1) below
{wherein R and R′ are each independently a hydrogen atom, an alkyl group, an alkoxy group, an aryl group or an aralkyl group; and
Ar1 is at least one moiety selected from the group consisting of moieties of formulas (2) to (13)
[R1 to R92 being each independently a hydrogen atom, a halogen atom, a sulfo group, an alkyl group of 1 to 10 carbon atoms which may have a branched structure, or an alkoxy group of 1 to 10 carbon atoms which may have a branched structure;
R93 and R94 being each a hydrogen atom or an alkyl group of 1 to 10 carbon atoms which may have a branched structure;
W1 and W2 being each independently a single bond, CR95R96 (wherein R95 and R96 are each independently a hydrogen atom or an alkyl group of 1 to 10 carbon atoms which may have a branched structure, and R95 and R96 may together form a ring), C═O, O, S, SO, SO2 or NR97 (wherein R97 is a hydrogen atom or an alkyl group of 1 to 10 carbon atoms which may have a branched structure); and
X1 and X2 being each independently a single bond, an alkylene group of 1 to 10 carbon atoms which may have a branched structure, or a group of formula (14)
(wherein R98 to R101 are each independently a hydrogen atom, a halogen atom, a sulfo group, an alkyl group of 1 to 10 carbon atoms which may have a branched structure, or an alkoxy group of 1 to 10 carbon atoms which may have a branched structure; and
Y1 and Y2 are each independently a single bond or an alkylene group of 1 to 10 carbon atoms which may have a branched structure)]} and having at least one triazine ring end, wherein at least a portion of the triazine ring ends is capped with carboxyl group-substituted arylamino groups.

### Claim 2 (depends on 1)

The triazine ring-containing polymer of claim 1, wherein the carboxyl group-substituted arylamino group has formula (15).

### Claim 3 (depends on 2)

The triazine ring-containing polymer of claim 2, wherein the carboxyl group-substituted arylamino group has formula (16).

### Claim 4 (depends on 1)

The triazine ring-containing polymer of claim 1, wherein Ar1 has formula (17).

### Claim 5 (depends on 1)

A triazine polymer-containing composition comprising the triazine ring-containing polymer of claim 1 and an organic solvent.

### Claim 6 (depends on 5)

The triazine polymer-containing composition of claim 5, further comprising a crosslinking agent.

### Claim 7 (depends on 6)

The triazine polymer-containing composition of claim 6, wherein the crosslinking agent is a poly(meth)acrylic compound.

### Claim 8 (depends on 6)

The triazine polymer-containing composition of claim 6 for use in forming a cured film or in patterning.

### Claim 9 (depends on 6)

A cured film obtained by curing the triazine polymer-containing composition of claim 6.

### Claim 10 (depends on 6)

A pattern produced from the triazine polymer-containing composition of claim 6.

### Claim 11 (depends on 9)

An electronic device comprising a substrate and the cured film of claim 9 formed on the substrate.

### Claim 12 (depends on 9)

An optical member comprising a substrate and the cured film of claim 9 formed on the substrate.

### Claim 13 (depends on 10)

An electronic device comprising a substrate and the pattern of claim 10 formed on the substrate.
