# US 2019/0169017 A1 · Planar cavity mems and related structures, methods of manufacture and design structures

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- Number: US 2019/0169017 A1
- Document ID: US20190169017A1
- Status: Published application
- Kind: A1
- Application number: 16/270,905
- Filed: 2019-02-08
- Published: 2019-06-06
- Earliest claimed: 2010-06-25
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Christopher V. JAHNES; Anthony K. STAMPER
- Web page: https://patentgrep.com/patent/US20190169017A1

## CPC

- B81C 1/00666: {Treatments for controlling internal stress or strain in MEMS structures}
- B81C 1/0015: {Cantilevers (switches using MEMS H01H1/0036; electrostatic relays using micromechanics H01H59/0009; microelectro-mechanical resonators H03H9/02244)}
- B81C 1/00365: {having low tensile stress between layers}
- B81C 1/00476: {removing a sacrificial layer (B81C1/00912 takes precedence)}
- B81C 1/00619: {Forming high aspect ratio structures having deep steep walls}
- B81C 1/00626: {Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619}
- G06F 30/39: Circuit design at the physical level (physical level design for reconfigurable circuits G06F30/347)
- H01H 1/0036: {Switches making use of microelectromechanical systems [MEMS] (for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009)}
- H01H 57/00: Electrostrictive relays; Piezoelectric relays
- H10N 30/306: {Cantilevers}
- B81B 2201/014: having a cantilever fixed on one side connected to one or more dimples
- B81B 2203/0118: Cantilevers
- B81B 2203/04: Electrodes
- B81C 2201/0109: Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
- B81C 2201/013: Etching
- B81C 2201/0167: by adding further layers of materials having complementary strains, i.e. compressive or tensile strain
- B81C 2201/017: Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169
- B81C 2203/0136: Growing or depositing of a covering layer
- B81C 2203/0172: Seals
- G06F 2115/04: Micro electro-mechanical systems [MEMS]
- H01H 2057/006: {Micromechanical piezoelectric relay}
- Y10S 438/937: Hillock prevention
- Y10T 29/42: Piezoelectric device making
- Y10T 29/435: Solid dielectric type
- Y10T 29/49002: Electrical device making
- Y10T 29/49105: Switch making
- Y10T 29/49121: Beam lead frame or beam lead device
- Y10T 29/49126: Assembling bases
- Y10T 29/4913: Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T 29/49155: Manufacturing circuit on or in base
- Y10T 29/5313: Means to assemble electrical device
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)
- H01H: ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES (contact cables H01B7/10; electrolytic self-interrupters H01G9/18; emergency protective circuit arrangements H02H; switching by electronic means without contact-making H03K17/00)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.

## Claims

### Claim 1

A method of forming a Micro-Electro-Mechanical System (MEMS), comprising:
forming a lower electrode;
forming a beam over the lower electrode;
forming a first sacrificial layer on the beam;
forming an insulator layer on the first sacrificial layer;
forming a cavity via in the insulator layer, exposing a portion of the first sacrificial layer;
forming an upper electrode on the insulator layer;
forming a second sacrificial layer over the beam and in the cavity via;
forming a lid material over the second sacrificial layer and the upper electrode;
providing a vent hole in the lid material to expose at least the second sacrificial layer;
venting the first sacrificial layer and the second sacrificial layer to form at least a lower cavity and an upper cavity; and
sealing the vent hole with a material.

### Claim 2 (depends on 1)

The method of claim 1, wherein the beam and the upper cavity are remote from the upper electrode.

### Claim 3 (depends on 1)

The method of claim 1, wherein the vent hole is rounded or chamfered.

### Claim 4 (depends on 1)

The method of claim 1, wherein the vent hole is octagonal.

### Claim 5 (depends on 1)

The method of claim 1, wherein the first sacrificial layer and the second sacrificial layer are silicon material.

### Claim 6 (depends on 1)

The method of claim 1, further comprising performing a hafnium clean to remove oxide and hydrogen on exposed surfaces of the second sacrificial layer prior to venting the first sacrificial layer and the second sacrificial layer.

### Claim 7 (depends on 6)

The method of claim 6, wherein the venting the first sacrificial layer and the second sacrificial layer is selective to silicon material.

### Claim 8 (depends on 1)

The method of claim 1, wherein the vent hole is provided greater than 5 microns away from the cavity via.

### Claim 9 (depends on 1)

The method of claim 1, wherein the lid material is formed prior to venting the first sacrificial layer and the second sacrificial layer.

### Claim 10 (depends on 1)

The method of claim 1, wherein the material sealing the vent hole comprises dielectric material.

### Claim 11 (depends on 1)

The method of claim 1, wherein the material sealing the vent hole comprises metal material.

### Claim 12 (depends on 1)

The method of claim 1, wherein the lid material comprises oxide material.