# US 2019/0168509 A1 · Method for manufacturing liquid discharge head, liquid discharge head, and method for manufacturing liquid discharge head substrate

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- Number: US 2019/0168509 A1
- Document ID: US20190168509A1
- Status: Published application
- Kind: A1
- Application number: 16/271,697
- Filed: 2019-02-08
- Published: 2019-06-06
- Earliest claimed: 2016-07-29
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Yuji Tamaru; Yuichiro Akama; Naoko Tsujiuchi; Sayaka Seki; Yasuaki Kitayama; Yusuke Hashimoto; Takanobu Manabe
- Web page: https://patentgrep.com/patent/US20190168509A1

## CPC

- B41J 2/16: Production of nozzles
- B41J 2/1603: {of the front shooter type}
- B41J 2/1607: {Production of print heads with piezoelectric elements (B41J2/1606, B41J2/162 take precedence)}
- B41J 2/1628: {dry etching}
- B41J 2/1629: {wet etching}
- B41J 2/1631: {photolithography}
- B41J 2/1637: {molding}
- B41J 2/1639: {sacrificial molding}
- B41J 2/1642: {thin film formation by CVD [chemical vapor deposition]}
- B41J 2/1646: {thin film formation by sputtering}
- B41J 2/1604: {of the edge shooter type}
- B41J 2/1623: {bonding and adhesion}
- B41J 2/1645: {thin film formation by spincoating}
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

There is provided a method for manufacturing a liquid discharge head including a liquid discharge head substrate and a flow path forming member, the liquid discharge head substrate having a base, a pressure generation portion provided at a front surface of the base to generate pressure for discharging a liquid, and a supply port for supplying the liquid to the pressure generation portion, and the flow path forming member forming a flow path for feeding the liquid supplied from the supply port to the pressure generation portion. The method includes removing a sacrificial layer by etching the base from a back surface of the base, in a state in which an end covering portion of a cover layer for covering the sacrificial layer is covered with the resin layer. The method suppresses formation of a crack in the end covering portion that covers the end portion of the sacrificial layer.

## Claims

### Claim 1

A liquid discharge head comprising:
a liquid discharge head substrate having a base, a pressure generation portion provided at a side of a front surface of the base to generate pressure for discharging a liquid, a cover layer provided at the side of the front surface of the base, and a supply port passing through the base and the cover layer to supply the liquid to the pressure generation portion;
a flow path forming member provided at the side of the front surface of the base to form a flow path for feeding the liquid supplied from the supply port to the pressure generation portion; and
a resin layer provided on a front surface of the cover layer facing the flow path forming member and provided over an opening edge portion of the supply port provided on the front surface of the cover layer,
wherein the resin layer includes a part contacting the front surface of the cover layer, and a step portion located at inside of the supply port as viewed from a direction orthogonal to the front surface of the base and the step portion includes a step coming closer to the flow path forming member than the part contacting the front surface of the cover layer.

### Claim 2 (depends on 1)

The liquid discharge head according to claim 1, further comprising an intermediate layer formed between the liquid discharge head substrate and the flow path forming member, using a same material as a material of the resin layer.

### Claim 3 (depends on 2)

The liquid discharge head according to claim 2, wherein the resin layer and the intermediate layer are connected.

### Claim 4 (depends on 3)

The liquid discharge head according to claim 3, wherein
the liquid discharge head substrate includes the pressure generation portions adjacent to each other,
the liquid discharge head comprises the pressure chambers each including the pressure generation portion, the flow paths communicating with the respective pressure chambers, and a common liquid chamber allowing the flow paths and the supply port to communicate with each other,
the intermediate layer is not provided in an area of a surface of the liquid discharge head substrate facing the flow path forming member across the pressure chambers, the flow paths, and a part of the common liquid chamber, and
the intermediate layer is connected to the resin layer through the common liquid chamber from between a partition of the flow path forming member to separate the pressure chambers adjacent to each other and the flow paths adjacent to each other and the liquid discharge head substrate.

### Claim 5 (depends on 1)

The liquid discharge head according to claim 1, wherein the resin layer is made of polyether amide.

### Claim 6 (depends on 1)

The liquid discharge head according to claim 1, wherein the resin layer is thicker than the cover layer.

### Claim 7 (depends on 1)

The liquid discharge head according to claim 1, wherein an opening, which has an opening area smaller than an opening area of the supply port of the cover layer viewed from the direction, is provided on the resin layer.

### Claim 8 (depends on 1)

The liquid discharge head according to claim 1, wherein the cover layer includes a silicon compound.

### Claim 9 (depends on 1)

The liquid discharge head according to claim 1, wherein the liquid discharge head substrate has a pressure generation element to form the pressure generation portion, and the cover layer includes a layer for covering the pressure generation element.