# US 2019/0168268 A1 · Gas purge unit and load port apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2019/0168268 A1 - Document ID: US20190168268A1 - Status: Published application - Kind: A1 - Application number: 16/198,231 - Filed: 2018-11-21 - Published: 2019-06-06 - Earliest claimed: 2014-11-21 - Assignees: TDK Corporation - Applicants: TDK Corporation - Inventors: Tadamasa IWAMOTO; Jun EMOTO - Web page: https://patentgrep.com/patent/US20190168268A1 ## CPC - B08B 5/02: Cleaning by the force of jets, e.g. blowing-out cavities {(airguns or nozzles per se B05B1/005)} - B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL ## Abstract A gas purge unit introduces a cleaning gas into a purge container with an opening therethrough. The gas purge unit includes a first blowout member second blowout member. The first blowout member is disposed along a lateral the opening and includes a first nozzle port. The first nozzle port blows the cleaning gas into the purge container. The second blowout member is disposed along the lateral side and includes a second nozzle port. The second nozzle port is disposed farther from the opening than the first nozzle port and blows the cleaning gas into the purge container. A load port apparatus includes the gas purge unit. ## Claims ### Claim 1 A gas purge unit for introducing a cleaning gas into a purge container with an opening therethrough, comprising: a first blowout member disposed along a lateral side of the opening and including a first nozzle port configured to blow the cleaning gas into the purge container; and a second blowout member disposed along the lateral side and including a second nozzle port disposed farther from the opening than the first nozzle port and configured to blow the cleaning gas into the purge container. ### Claim 2 (depends on 1) The gas purge unit according to claim 1, further comprising a third blowout member disposed along an upper side of the opening and including a third nozzle port configured to blow the cleaning gas along an opening surface of the opening. ### Claim 3 (depends on 1) The gas purge unit according to claim 1, wherein the first blowout member includes a first channel for the cleaning gas connected to the first nozzle port, the third blowout member includes a third channel for the cleaning gas connected to the third nozzle port, and the first blowout member and the third blowout member are connected so that the first channel and the third channel are communicated. ### Claim 4 (depends on 1) The gas purge unit according to claim 1, wherein the second blowout member includes a second channel for the cleaning gas connected to the second nozzle port, the third blowout member includes a third channel for the cleaning gas connected to the third nozzle port, and the second blowout member and the third blowout member are connected so that the second channel and the third channel are communicated. ### Claim 5 (depends on 1) The gas purge unit according to claim 1, further comprising a cover member disposed with a predetermined distance to the first blowout member and the second blowout member and surrounding the first blowout member and the second blowout member at least from the other side of blowout directions of the first nozzle port and the second nozzle port. ### Claim 6 (depends on 1) The gas purge unit according to claim 1, further comprising an eave member disposed along an upper side of the opening and protruding in a normal direction of an opening surface of the opening. ### Claim 7 (depends on 1) The gas purge unit according to claim 1, further comprising: a cover member disposed with a predetermined distance to the first blowout member and the second blowout member and surrounding the first blowout member and the second blowout member at least from the other side of blowout directions of the first nozzle port and the second nozzle port; and an eave member disposed along an upper side of the opening and protruding in a normal direction of an opening surface of the opening, wherein the cover member and the eave member are integrally connected to each other. ### Claim 8 (depends on 1) A load port apparatus comprising the gas purge unit according to claim 1. ### Claim 9 A gas purge unit for introducing a cleaning gas into a purge container with an opening therethrough, comprising: a first nozzle port configured to blow the cleaning gas from a lateral side of the opening into the purge container; and a second nozzle port disposed farther from the opening than the first nozzle port and configured to blow the cleaning gas into the purge container. ### Claim 10 (depends on 9) The gas purge unit according to claim 9, wherein the first nozzle port and the second nozzle port are formed on a single bidirectional blowout member. ### Claim 11 (depends on 10) The gas purge unit according to claim 10, wherein the bidirectional blowout member is disposed at least at one of lateral sides of the opening. ### Claim 12 (depends on 10) The gas purge unit according to claim 10, wherein the bidirectional blowout members are arranged to face each other at both lateral sides of the opening. ### Claim 13 (depends on 9) The gas purge unit according to claim 9, wherein the first nozzle outlet is formed on a first-dedicated blowout member disposed at least at one of lateral sides of the opening. ### Claim 14 (depends on 9) The gas purge unit according to claim 9, wherein the second nozzle outlet is formed on a second-dedicated blowout member disposed at least at one of lateral sides of the opening. ### Claim 15 (depends on 9) The gas purge unit according to claim 9, wherein the first nozzle outlet is formed on a first-dedicated blowout member, the second nozzle outlet is formed on a second-dedicated blowout member, a pair of first-dedicated blowout members is arranged to face each other at both lateral sides of the opening, and the second-dedicated blowout member is disposed at least at one of the lateral sides of the opening. ### Claim 16 (depends on 9) The gas purge unit according to claim 9, wherein the first nozzle outlet is formed on a first-dedicated blowout member, the second nozzle outlet is formed on a second-dedicated blowout member, a pair of second-dedicated blowout members is arranged to face each other at both lateral sides of the opening, and the first-dedicated blowout member is disposed at least at one of the lateral sides of the opening. ### Claim 17 (depends on 9) A load port apparatus comprising the gas purge unit according to claim 9.